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| Class Numbers & Titles | Class Numbers Only | USPC Index | International | HELP |
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| Class 117 | SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR |
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![]() | ![]() | 1 | PROCESSES JOINING INDEPENDENT CRYSTALS |
![]() | ![]() | 2 | PROCESSES OF GROWTH WITH A SUBSEQUENT STEP ACTING ON THE CRYSTAL TO ADJUST THE IMPURITY AMOUNT (E.G., DIFFUSING, DOPING, GETTERING, IMPLANTING) |
![]() | ![]() | 3 | PROCESSES OF GROWTH WITH A SUBSEQUENT STEP OF HEAT TREATING OR DELIBERATE CONTROLLED COOLING OF THE SINGLE-CRYSTAL |
![]() | ![]() | 4 | PROCESSES OF GROWTH FROM SOLID OR GEL STATE (E.G., SOLID PHASE RECRYSTALLIZATION) |
![]() | ![]() | 11 | PROCESSES OF GROWTH FROM LIQUID OR SUPERCRITICAL STATE |
![]() | ![]() | 12 | Crucibleless process having movement of discrete droplets or solid particles to thin-film precursor (e.g., Verneuil method) |
![]() | ![]() | 13 | Having pulling during growth (e.g., Czochralski method, zone drawing) |
![]() | ![]() | 14 | With a step of measuring, testing, or sensing (e.g., using TV, photo, or X-ray detector or weight changes) |
![]() | ![]() | 17 | With contact with an immiscible liquid (e.g., LEC) |
![]() | ![]() | 19 | Forming an intended mixture (excluding mixed crystal) (e.g., doped) |
![]() | ![]() | 20 | Comprising a silicon crystal with oxygen containing impurity |
![]() | ![]() | 21 | Comprising a semiconductor with a charge carrier impurity |
![]() | ![]() | 23 | Shape defined by a solid member other than seed or product (e.g., edge-defined film-fed growth, Stepanov method) |
![]() | ![]() | 24 | Embedded in product (e.g., string-stabilized web) |
![]() | ![]() | 25 | Defines a product with a hollow structure (e.g., tube) |
![]() | ![]() | 26 | Defines a flat product |
![]() | ![]() | 28 | Including non-coincident axes of rotation (e.g., relative eccentric) |
![]() | ![]() | 29 | Passing non-induced electric current through a crystal-liquid interface (e.g., Peltier) |
![]() | ![]() | 30 | With liquid flow control or manipulation during growth (e.g., mixing, replenishing, magnetic levitation, stabilization, convection control, baffle) |
![]() | ![]() | 31 | Including a sectioned crucible (e.g., double crucible, baffle) |
![]() | ![]() | 32 | Using a magnetic field |
![]() | ![]() | 33 | Replenishing of precursor during growth (e.g., continuous method, zone pulling) |
![]() | ![]() | 35 | With a significant technique for (a) preliminary preparation or growth starting or (b) product handling or growth ending (e.g., arrangement of or crystallography of seed) |
![]() | ![]() | 36 | Precursor intentionally contains an excess component or a non-product appearing component (e.g., solvent, flux, crystal lattice modifier) |
![]() | ![]() | 37 | Having moving solid-liquid-solid region |
![]() | ![]() | 38 | Including a step of measuring, testing, or sensing |
![]() | ![]() | 41 | Precursor composition intentionally different from product (e.g., excess component, non-product forming component, dopant, non-stoichiometric precursor, travelling solvent, flux) |
![]() | ![]() | 43 | Distinctly layered product (e.g., twin, SOI, epitaxial crystallization) |
![]() | ![]() | 44 | Adjacent single-crystal product regions separately formed (e.g., multiple non-coextensive passes of a scanning laser) |
![]() | ![]() | 45 | Non-planar crystal grown (e.g., ELO) |
![]() | ![]() | 46 | Movement includes a horizontal component |
![]() | ![]() | 47 | Flat, free-standing (i.e., substrate-free) product (e.g., ribbon, film, sheet) |
![]() | ![]() | 48 | Solid heating means contacting the liquid (e.g., immersed) |
![]() | ![]() | 49 | Liquid zone contacts only precursor and product solids (e.g., crucibleless, liquid encapsulant, float zone) |
![]() | ![]() | 53 | Forming a single-crystal region by liquefying a region of a single-crystal and adjusting the composition of the liquid (e.g., alloying, regrowth) |
![]() | ![]() | 54 | Liquid phase epitaxial growth (LPE) |
![]() | ![]() | 55 | With a step of measuring, testing, or sensing |
![]() | ![]() | 56 | Including change in a growth-influencing parameter (e.g., composition, temperature, concentration, flow rate) during growth (e.g., multilayer or junction or superlattice growing) |
![]() | ![]() | 58 | With pretreatment of epitaxy substrate (e.g., autodoping control, cleaning, polishing, leveling, masking) |
![]() | ![]() | 59 | Including a tipping system (e.g., rotation, pivoting) |
![]() | ![]() | 60 | Including a vertical dipping system |
![]() | ![]() | 61 | Including a sliding boat system |
![]() | ![]() | 62 | Electric current controlled or induced growth |
![]() | ![]() | 63 | Characterized by specified crystallography of the substrate |
![]() | ![]() | 64 | Precursor composition intentionally contains an excess component or a non-product appearing component (e.g., solvent, flux) |
![]() | ![]() | 68 | Having growth from a solution comprising a solvent which is liquid at or below 20 degrees Celsius (e.g., aqueous solution) |
![]() | ![]() | 69 | With a step of measuring, testing, or sensing |
![]() | ![]() | 70 | Growth accompanied by material removal (other than the product) from solution (e.g., solvent evaporation, osmosis) |
![]() | ![]() | 71 | At pressure above 1 atmosphere (e.g., hydrothermal processes) |
![]() | ![]() | 73 | Havin growth from molten state (e.g., solution melt) |
![]() | ![]() | 74 | Including change in a growth-influencing parameter (e.g., composition, temperature, concentration, flow rate) during growth (e.g., multilayer or junction or superlattice growing) |
![]() | ![]() | 75 | Forming a platelet shape or a small diameter, elongate, generally cylindrical shape (e.g., whisker, fiber, needle, filament) (e.g., VLS method) |
![]() | ![]() | 76 | Using a scavenger agent (e.g., remove, add, deplete, or redistribute impurity or dopant) |
![]() | ![]() | 77 | Gas or vapor state precursor or overpressure |
![]() | ![]() | 78 | Precursor composition intentionally different from product (e.g., excess component, non-product forming component, dopant, non-stoichiometric precursor, solvent, flux) |
![]() | ![]() | 79 | Unusable portion contains a metal atom (e.g., diamond or CBN growth in metal solvent) |
![]() | ![]() | 80 | Unusable portion contains an oxygen atom (e.g., oxide flux) |
![]() | ![]() | 81 | Growth confined by a solid member other than seed or product (e.g., Bridgman-Stockbarger method) |
![]() | ![]() | 84 | FORMING FROM VAPOR OR GASEOUS STATE (E.G., VPE, SUBLIMATION) |
![]() | ![]() | 85 | With a step of measuring, testing, or sensing |
![]() | ![]() | 87 | Forming a platelet shape or a small diameter, elongate, generally cylindrical shape (e.g., whisker, fiber, needle, filament) |
![]() | ![]() | 88 | With decomposition of a precursor (except impurity or dopant precursor) composed of diverse atoms (e.g., CVD) |
![]() | ![]() | 89 | Including change in a growth-influencing parameter (e.g., composition, temperature, concentration, flow rate) during growth (e.g., multilayer or junction or superlattice growing) |
![]() | ![]() | 90 | With pretreatment of substrate (e.g., coacting ablating) |
![]() | ![]() | 91 | With a chemical reaction (except ionization) in a disparate zone to form a precursor |
![]() | ![]() | 92 | Using an energy beam or field, a particle beam or field, or a plasma (e.g., ionization, PECVD, CBE, MOMBE, RF induction, laser) |
![]() | ![]() | 93 | With significant flow manipulation or condition, other than merely specifying the components or their sequence or both |
![]() | ![]() | 94 | With pretreatment or preparation of a base (e.g., annealing) |
![]() | ![]() | 98 | With a movement of substrate or vapor or gas supply means during growth (e.g., substrate rotation) |
![]() | ![]() | 99 | With a chemical reaction (except ionization) in a disparate zone to form a precursor (e.g., transport processes) |
![]() | ![]() | 101 | Characterized by specified crystallography or arrangement of substrate (e.g., wafer cassette, Miller index) |
![]() | ![]() | 102 | With significant flow manipulation or condition, other than merely specifying the components or their sequence or both |
![]() | ![]() | 103 | Using an energy beam or field, a particle beam or field, or a plasma (e.g., ionization, PECVD, CBE, MOMBE, RF induction, laser) |
![]() | ![]() | 104 | Using an organic precursor (e.g., propane, metal-organic, MOCVD, MOVPE) |
![]() | ![]() | 105 | Including change in a growth-influencing parameter (e.g., composition, temperature, concentration, flow rate) during growth (e.g., multilayer or junction or superlattice growing) |
![]() | ![]() | 106 | With pretreatment or preparation of a base (e.g., annealing) |
![]() | ![]() | 107 | With movement of substrate or vapor or gas supply means during growth |
![]() | ![]() | 108 | Using an energy beam or field, a particle beam or field, or a plasma (e.g., MBE) |
![]() | ![]() | 109 | Fully-sealed or vacuum-maintained chamber (e.g., ampoule) |
![]() | ![]() | 200 | APPARATUS |