US 9,814,126 B2
Photon source, metrology apparatus, lithographic system and device manufacturing method
Martijn Petrus Christianus Van Heumen, Eindhoven (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 15/29,285
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Sep. 23, 2014, PCT No. PCT/EP2014/070200
§ 371(c)(1), (2) Date Apr. 14, 2016,
PCT Pub. No. WO2015/055387, PCT Pub. Date Apr. 23, 2015.
Claims priority of provisional application 61/892,156, filed on Oct. 17, 2013.
Prior Publication US 2016/0255710 A1, Sep. 1, 2016
Int. Cl. G03F 7/20 (2006.01); H05H 1/24 (2006.01); H01J 61/34 (2006.01); H01J 61/40 (2006.01); H01J 65/04 (2006.01); G01N 21/71 (2006.01); G01N 21/956 (2006.01)
CPC H05H 1/24 (2013.01) [G01N 21/71 (2013.01); G03F 7/70016 (2013.01); G03F 7/70575 (2013.01); G03F 7/70616 (2013.01); G03F 7/70916 (2013.01); H01J 61/34 (2013.01); H01J 61/40 (2013.01); H01J 65/04 (2013.01); G01B 2210/56 (2013.01); G01N 21/956 (2013.01); G01N 2201/068 (2013.01); G01N 2201/06113 (2013.01)] 26 Claims
OG exemplary drawing
 
1. A radiation produced plasma-based photon source apparatus, comprising:
a first container configured to contain a medium in which a plasma is generated following excitation by a driving radiation, where the plasma is in an elongate form having a length along a longitudinal axis that is substantially greater than its diameter in a direction transverse to the longitudinal axis, and
a second container configured to enclose the first container,
wherein the first container is operable to emit output radiation, the output radiation emerging from one end of the plasma along the longitudinal axis, and the output radiation further comprising an ultraviolet component;
wherein the output radiation is directed out of the first and second containers along the longitudinal axis; and
wherein the second container is operable to substantially remove the ultraviolet component from the output radiation.