US 9,812,672 B2
Systems, devices and methods for quality monitoring of deposited films in the formation of light emitting devices
Christopher Cocca, Fremont, CA (US)
Assigned to Kateeva, Inc., Newark, CA (US)
Filed by Kateeva, Inc., Newark, CA (US)
Filed on Aug. 29, 2016, as Appl. No. 15/250,283.
Application 15/250,283 is a continuation of application No. 14/180,015, filed on Feb. 13, 2014, granted, now 9,443,299, issued on Sep. 13, 2016.
Claims priority of provisional application 61/766,064, filed on Feb. 18, 2013.
Prior Publication US 2017/0077461 A1, Mar. 16, 2017
Int. Cl. G06T 7/00 (2017.01); H01L 51/56 (2006.01); H01L 51/00 (2006.01)
CPC H01L 51/56 (2013.01) [G06T 7/001 (2013.01); G06T 7/0004 (2013.01); G06T 7/0008 (2013.01); H01L 51/0004 (2013.01); H01L 51/0031 (2013.01); G06T 2207/10024 (2013.01); G06T 2207/20072 (2013.01); G06T 2207/30121 (2013.01)] 26 Claims
OG exemplary drawing
 
1. A computer-implemented method for monitoring quality of a film deposited on a substrate, the film to form a layer in respective light emitting elements fabricated on the substrate, the film to span for each of the light emitting elements an area of predetermined dimensions, the computer-implemented method comprising:
for each one of the light emitting elements
obtaining a digital image of the film following deposition, the digital image encompassing the area of predetermined dimensions for the one of the light emitting elements,
masking the digital image to isolate image data corresponding to the area of predetermined dimensions for the one of the light emitting elements,
processing the isolated image data to emphasize gradients in the isolated image data which are greater than a non-zero threshold,
dependent on the emphasized gradients which are greater than the non-zero threshold, identifying the existence of a defect; and
automatically identifying a quality issue for the film deposited on the substrate, dependent on said identifying.