US 9,812,636 B2
Integrated circuit including sensor having injection molded magnetic material
Udo Ausserlechner, Villach (AT)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on Nov. 30, 2013, as Appl. No. 14/93,462.
Application 14/093,462 is a continuation of application No. 13/594,974, filed on Aug. 27, 2012.
Application 13/594,974 is a continuation of application No. 11/950,050, filed on Dec. 4, 2007, granted, now 8,587,297, issued on Nov. 19, 2013.
Prior Publication US 2014/0084403 A1, Mar. 27, 2014
Int. Cl. G01R 33/02 (2006.01); H01L 43/02 (2006.01); G01R 33/07 (2006.01); H01L 43/12 (2006.01); H01L 43/00 (2006.01)
CPC H01L 43/02 (2013.01) [G01R 33/072 (2013.01); H01L 43/12 (2013.01); H01L 43/00 (2013.01); H01L 2224/32245 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48247 (2013.01); H01L 2224/48472 (2013.01); H01L 2224/49171 (2013.01); H01L 2224/73265 (2013.01); Y10T 29/49121 (2015.01); Y10T 29/49158 (2015.01)] 14 Claims
OG exemplary drawing
 
1. A method for fabricating an integrated circuit, the method comprising:
providing a magnetic field sensor including first and second magnetic field sensor elements;
injection molding plastic material over at least a portion of the magnetic field sensor, the injection molding of the plastic material creating a projection of the plastic material that extends from a surface of the injection molded plastic material in a first direction; and
injection molding magnetic material over at least the portion of the magnetic field sensor and the surface of the injection molded plastic material, the injection molding magnetic material forming a permanent magnet, wherein:
a recessed portion is formed in a surface of the injection molded magnetic material below the magnetic field sensor, the recessed portion being configured to accept the projection of the plastic material,
the recessed portion and the projection, viewed in the first direction, are positioned between the first and the second magnetic field sensor elements in a second direction orthogonal to the first direction, and
the surface of the injection molded magnetic material and the surface of the injection molded plastic material contact each other during acceptance of the projection within the recessed portion.