US 9,812,634 B2
Method of making thick film transducer arrays
Peter G. Barthe, Phoenix, AZ (US)
Assigned to Ardent Sounds, Inc., Mesa, AZ (US)
Filed by Ardent Sound, Inc., Mesa, AZ (US)
Filed on Jan. 8, 2016, as Appl. No. 14/990,993.
Application 14/990,993 is a continuation of application No. 13/863,362, filed on Apr. 15, 2013, granted, now 9,263,663.
Claims priority of provisional application 61/623,571, filed on Apr. 13, 2012.
Prior Publication US 2016/0126451 A1, May 5, 2016
Int. Cl. H01L 41/29 (2013.01); H01L 41/22 (2013.01); B06B 1/06 (2006.01)
CPC H01L 41/22 (2013.01) [B06B 1/0622 (2013.01); H01L 41/29 (2013.01); Y10T 29/42 (2015.01)] 14 Claims
OG exemplary drawing
1. A method of fabricating a transducer array, the method comprising:
a) printing a first electrode onto a lens shaped depression of a face of a block of backing material and over a first edge along a length of the depression;
b) printing a layer of lead zirconate titanate (PZT) material into the depression and on the first electrode;
c) printing a second electrode into the depression and on the layer of PZT and over a second edge along the length of the depression, wherein the first edge and the second edge are different, wherein a first length of the first electrode over the first edge is different than a second length of the second electrode over the second edge; and
d) placing a plurality of cuts into the depression and perpendicular to the length, wherein the plurality of cuts electrically and mechanically isolate each element of the transducer array.