US 9,812,631 B2
Piezoelectric/electrostrictive actuator
Takashi Ebigase, Nagoya (JP); and Koji Katsu, Tajimi (JP)
Assigned to NGK Insulators, Ltd., Nagoya (JP); and NGK Ceramic Device Co., Ltd., Komaki-Shi (JP)
Filed by NGK Insulators, Ltd., Nagoya-Shi (JP); and NGK Ceramic Device Co., Ltd., Komaki-Shi (JP)
Filed on Mar. 14, 2014, as Appl. No. 14/211,824.
Application 14/211,824 is a continuation of application No. PCT/JP2012/073822, filed on Sep. 18, 2012.
Claims priority of application No. 2011-206898 (JP), filed on Sep. 22, 2011; and application No. 2012-058887 (JP), filed on Mar. 15, 2012.
Prior Publication US 2016/0380177 A1, Dec. 29, 2016
Int. Cl. H01L 41/053 (2006.01); H01L 41/09 (2006.01); H01L 41/23 (2013.01); H01L 41/047 (2006.01); H01L 41/18 (2006.01); H01L 41/187 (2006.01)
CPC H01L 41/09 (2013.01) [H01L 41/047 (2013.01); H01L 41/0533 (2013.01); H01L 41/0973 (2013.01); H01L 41/183 (2013.01); H01L 41/23 (2013.01); H01L 41/1876 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A piezoelectric/clectrostrictive actuator which comprises:
a piezoelectric/electrostrictive element comprising at least one laminated object including a piezoelectric/electrostrictive layer and a pair of electrodes arranged respectively on both sides of said piezoelectric/electrostrictive layer, and having an operating part corresponding to the portion in which said piezoelectric/electrostrictive layer is sandwiched in between said pair of electrodes and a non-operating part corresponding to the portion in which said piezoelectric/electrostrictive layer is not sandwiched in between said pair of electrodes, and
a moisture-proof film arranged so as to cover at least the vicinity of a boundary between said operating part and said non-operating part, consisting of a liquid with a saturated moisture content at 25 degree Celsius of 300 ppm or less and a withstand voltage at the saturated moisture content of not less than 6 kV/mm, and said liquid contains, as a main component, hydrocarbon system organic compound having a main backbone of carbon-carbon bond and consisting only of carbon and hydrogen.