US 9,812,605 B2
Nano-pillar-based biosensing device
Yann Astier, Livermore, CA (US); Huan Hu, Yorktown Heights, NY (US); Ning Li, White Plains, NY (US); Devendra K. Sadana, Pleasantville, NY (US); Joshua T. Smith, Croton on Hudson, NY (US); and William T. Spratt, Osssing, NY (US)
Assigned to International Business Machines Corporation, Armonk, NY (US)
Filed by International Business Machines Corporation, Armonk, NY (US)
Filed on Nov. 16, 2016, as Appl. No. 15/352,921.
Application 15/352,921 is a continuation of application No. 14/972,996, filed on Dec. 17, 2015.
Prior Publication US 2017/0179328 A1, Jun. 22, 2017
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 31/173 (2006.01); H01L 31/105 (2006.01); H01L 33/00 (2010.01); H01L 31/0216 (2014.01); B01L 3/00 (2006.01)
CPC H01L 31/173 (2013.01) [B01L 3/502715 (2013.01); H01L 31/02164 (2013.01); H01L 31/105 (2013.01); H01L 33/0012 (2013.01); B01L 2300/0627 (2013.01); B01L 2300/12 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device comprising:
a trench formed in a substrate, the trench including a first end, a second end, and a bend;
a first plurality of semiconductor pillars positioned near the first end of the trench and including integrated light sources; and
a second plurality of semiconductor pillars positioned near the second end of the trench and including integrated photodetectors.