| US 9,812,605 B2 | ||
| Nano-pillar-based biosensing device | ||
| Yann Astier, Livermore, CA (US); Huan Hu, Yorktown Heights, NY (US); Ning Li, White Plains, NY (US); Devendra K. Sadana, Pleasantville, NY (US); Joshua T. Smith, Croton on Hudson, NY (US); and William T. Spratt, Osssing, NY (US) | ||
| Assigned to International Business Machines Corporation, Armonk, NY (US) | ||
| Filed by International Business Machines Corporation, Armonk, NY (US) | ||
| Filed on Nov. 16, 2016, as Appl. No. 15/352,921. | ||
| Application 15/352,921 is a continuation of application No. 14/972,996, filed on Dec. 17, 2015. | ||
| Prior Publication US 2017/0179328 A1, Jun. 22, 2017 | ||
| This patent is subject to a terminal disclaimer. | ||
| Int. Cl. H01L 31/173 (2006.01); H01L 31/105 (2006.01); H01L 33/00 (2010.01); H01L 31/0216 (2014.01); B01L 3/00 (2006.01) | ||
| CPC H01L 31/173 (2013.01) [B01L 3/502715 (2013.01); H01L 31/02164 (2013.01); H01L 31/105 (2013.01); H01L 33/0012 (2013.01); B01L 2300/0627 (2013.01); B01L 2300/12 (2013.01)] | 20 Claims |
| 1. A device comprising:
a trench formed in a substrate, the trench including a first end, a second end, and a bend;
a first plurality of semiconductor pillars positioned near the first end of the trench and including integrated light sources;
and
a second plurality of semiconductor pillars positioned near the second end of the trench and including integrated photodetectors.
|