US 9,812,601 B2
Solar celll
Anthony Lochtefeld, Ipswich, MA (US)
Assigned to Amberwave Inc., Salem, NH (US)
Filed by Anthony Lochtefeld, Ipswich, MA (US)
Filed on Mar. 17, 2014, as Appl. No. 14/217,045.
Claims priority of provisional application 61/799,148, filed on Mar. 15, 2013.
Prior Publication US 2014/0261652 A1, Sep. 18, 2014
Int. Cl. H01L 21/00 (2006.01); H01L 31/0687 (2012.01); H01L 31/18 (2006.01)
CPC H01L 31/0687 (2013.01) [H01L 31/1852 (2013.01); Y02E 10/544 (2013.01); Y02P 70/521 (2015.11)] 11 Claims
OG exemplary drawing
 
1. A method of making a multi junction solar cell comprising the actions of:
providing a silicon substrate;
etching a first surface of the silicon substrate;
depositing a dielectric layer on the first surface of the silicon substrate;
etching a second surface of the silicon substrate wherein the dielectric layer masks the first surface during the action of etching a second surface of the silicon substrate;
depositing a silicon germanium graded buffer layer on the second surface of the substrate;
depositing a first solar subcell base layer and a first solar subcell emitter layer within or on top of the graded buffer layer; and
depositing a second solar subcell base layer and a second solar subcell emitter layer of GaAsP or other III-V material on top of the first solar subcell base layer and the first solar subcell emitter layer.