US 9,812,595 B1
All-wavelength (VIS-LWIR) transparent electrical contacts and interconnects and methods of making them
Kyung-Ah Son, Moorpark, CA (US)
Assigned to HRL Laboratories, LLC, Malibu, CA (US)
Filed by HRL Laboratories, LLC, Malibu, CA (US)
Filed on Nov. 22, 2016, as Appl. No. 15/359,532.
Application 15/359,532 is a division of application No. 14/530,365, filed on Oct. 31, 2014, granted, now 9,548,415.
Int. Cl. H01B 5/00 (2006.01); B32B 37/12 (2006.01); B82Y 30/00 (2011.01); H05K 1/03 (2006.01); H05K 1/09 (2006.01); H05K 3/10 (2006.01); H01L 31/0224 (2006.01); H01L 31/18 (2006.01); H01L 31/0304 (2006.01); H01L 31/0296 (2006.01); H01L 31/0352 (2006.01); H01L 31/0216 (2014.01); H01L 27/144 (2006.01); H01L 31/02 (2006.01)
CPC H01L 31/022491 (2013.01) [H01L 27/1446 (2013.01); H01L 31/02019 (2013.01); H01L 31/02161 (2013.01); H01L 31/02966 (2013.01); H01L 31/0304 (2013.01); H01L 31/03046 (2013.01); H01L 31/035236 (2013.01); H01L 31/1864 (2013.01); H01L 31/1868 (2013.01); H01L 31/1884 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A method for fabricating an optically transparent conductor, the method comprising:
depositing a plurality of metal nanowires on a substrate;
annealing or illuminating the plurality of metal nanowires to thermally or optically fuse nanowire junctions between metal nanowires to form a metal nanowire network;
disposing a graphene layer over the metal nanowire network to form a nanohybrid layer comprising the graphene layer and the metal nanowire network;
depositing a dielectric passivation layer over the nanohybrid layer;
patterning the dielectric passivation layer using lithography, printing, or any other method of patterning to define an area for the optically transparent conductor; and
etching the patterned dielectric passivation layer to form the optically transparent conductor; wherein the optically transparent conductor has a transmittance greater than 92% over the entire range extending from the near infrared to the long wavelength infrared.