US 9,812,591 B2
Self-balancing position sensitive detector
James Castracane, Albany, NY (US); Natalya Tokranova, Cohoes, NY (US); and Leigh Lydecker, Wallkill, NY (US)
Assigned to THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK, Albany, NY (US)
Appl. No. 15/501,961
Filed by THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK, Albany, NY (US)
PCT Filed Jun. 10, 2016, PCT No. PCT/US2016/036894
§ 371(c)(1), (2) Date Feb. 6, 2017,
PCT Pub. No. WO2016/209642, PCT Pub. Date Dec. 29, 2016.
Claims priority of provisional application 62/182,713, filed on Jun. 22, 2015.
Prior Publication US 2017/0256659 A1, Sep. 7, 2017
Int. Cl. H01L 31/00 (2006.01); H01L 31/02 (2006.01); H01L 31/147 (2006.01); G01J 1/44 (2006.01)
CPC H01L 31/02024 (2013.01) [G01J 1/44 (2013.01); H01L 31/02005 (2013.01); H01L 31/147 (2013.01); G01J 2001/446 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A self-balancing optical position sensitive detector, comprising a pair of spaced apart, parallel, longitudinally extending doped regions on a first surface on a front side of a substrate of opposite doping type with contact pads on the front side at respective ends of a first doped region of the pair, a voltage source applying a potential difference between the contact pads of the first doped region, and a contact pad of a second doped region of the pair on the front side providing an output signal representative of a longitudinal position of a center of gravity of an incident light pattern along the doped regions, without any contact on a backside of the substrate or external circuitry processing the output signal to obtain a readout of the longitudinal position.