US 9,812,525 B2
Universal methodology to synthesize diverse two-dimensional heterostructures
Mildred S. Dresselhaus, Arlington, MA (US); Jing Kong, Winchester, MA (US); Tomas A. Palacios, Belmont, MA (US); Xi Ling, Cambridge, MA (US); and Yuxuan Lin, Cambridge, MA (US)
Assigned to Massachusetts Institute of Technology, Cambridge, MA (US)
Filed by Massachusetts Institute of Technology, Cambridge, MA (US)
Filed on Dec. 9, 2016, as Appl. No. 15/373,687.
Claims priority of provisional application 62/265,966, filed on Dec. 10, 2015.
Prior Publication US 2017/0170260 A1, Jun. 15, 2017
Int. Cl. H01L 29/06 (2006.01); H01L 29/24 (2006.01); H01L 21/02 (2006.01)
CPC H01L 29/068 (2013.01) [H01L 21/0242 (2013.01); H01L 21/0259 (2013.01); H01L 21/0262 (2013.01); H01L 21/02568 (2013.01); H01L 21/02645 (2013.01); H01L 29/0665 (2013.01); H01L 29/24 (2013.01); H01L 21/02112 (2013.01); H01L 21/02551 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A method for synthesizing a two-dimensional heterostructure, comprising:
producing a patterned first two-dimensional material on a growth substrate, wherein the patterned first two-dimensional material defines at least one void through which an exposed region of the growth substrate is exposed;
selectively depositing seed molecules either on the exposed region of the growth substrate or on the patterned first two-dimensional material; and
growing a second two-dimensional material from the seed molecules, wherein the second two-dimensional material is distinct from the patterned first two-dimensional material.