US 9,812,523 B2
Capacitance structure
Mehmet Goekcen, Unterhaching (DE); Jacek Kruppa, Unterhaching (DE); and Thomas Steinecke, Hofsingelding (DE)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on May 24, 2013, as Appl. No. 13/902,760.
Claims priority of application No. 10 2012 010 305 (DE), filed on May 24, 2012.
Prior Publication US 2013/0313681 A1, Nov. 28, 2013
Int. Cl. H01L 49/02 (2006.01); H01L 29/94 (2006.01); H01L 23/495 (2006.01); H01L 23/522 (2006.01); H01L 23/64 (2006.01); H01L 23/00 (2006.01)
CPC H01L 28/60 (2013.01) [H01L 23/49589 (2013.01); H01L 23/5223 (2013.01); H01L 23/642 (2013.01); H01L 29/945 (2013.01); H01L 24/16 (2013.01); H01L 24/49 (2013.01); H01L 24/73 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/16265 (2013.01); H01L 2224/32145 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/32245 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48145 (2013.01); H01L 2224/48227 (2013.01); H01L 2224/48247 (2013.01); H01L 2224/48265 (2013.01); H01L 2224/73207 (2013.01); H01L 2224/73265 (2013.01); H01L 2924/00014 (2013.01); H01L 2924/19104 (2013.01); H01L 2924/19105 (2013.01); H01L 2924/3011 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A capacitance structure comprising:
a first input terminal configured to input a first input signal,
a first output terminal configured to output the first output signal,
a second input terminal configured to input a second input signal,
a second output terminal configured to output a second output signal, and
a plurality of trench cells,
wherein each of the plurality of trench cells comprises a first electrode and a second electrode,
wherein the first electrodes of the plurality of trenches are interconnected to form a first capacitance structure electrode,
wherein the second electrodes of the plurality of trench cells are interconnected to form a second capacitance structure electrode,
wherein the first capacitance structure electrode is connected to the first input terminal, and
wherein the second capacitance structure electrode is connected to the second input terminal,
wherein the plurality of trench cells is formed in a substrate,
wherein the first electrodes of the plurality of trench cells are coupled to the first input terminal in a first plane extending parallel to a first main surface of the substrate, and
wherein the first electrodes of the plurality of trench cells are coupled to the first output terminal in a third plane extending parallel to a second main surface of the substrate.