US 9,812,470 B2
Electro-optical apparatus and electronic apparatus
Yohei Sugimoto, Fujimi-machi (JP)
Assigned to Seiko Epson Corporation, Tokyo (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Mar. 9, 2016, as Appl. No. 15/65,546.
Claims priority of application No. 2015-001533U (JP), filed on Mar. 31, 2015.
Prior Publication US 2016/0293644 A1, Oct. 6, 2016
Int. Cl. H01L 29/12 (2006.01); H01L 27/12 (2006.01); H01L 29/786 (2006.01)
CPC H01L 27/1255 (2013.01) [H01L 29/78633 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An electro-optical apparatus comprising:
a substrate;
an insulation layer which is disposed above the substrate;
a groove which is disposed in the insulation layer; and
a first capacitor which is disposed at the groove and has a first electrode, a first insulation film disposed on the first electrode, and a second electrode disposed on the first insulation film, and
a second capacitor which is disposed on the first capacitor and has the second electrode, a second insulation film disposed on the second electrode, and a third electrode disposed on the second insulation film.