US 9,812,396 B1
Interconnect structure for semiconductor devices with multiple power rails and redundancy
Jason Eugene Stephens, Menands, NY (US); Guillaume Bouche, Albany, NY (US); Shreesh Narasimha, Beacon, NY (US); Patrick Ryan Justison, Clifton Park, NY (US); Byoung Youp Kim, Schenectady, NY (US); and Craig Michael Child, Jr., Gansevoort, NY (US)
Assigned to GLOBALFOUNDRIES INC., Grand Cayman (KY)
Filed by GLOBALFOUNDRIES Inc., Grand Cayman (KY)
Filed on Jun. 7, 2016, as Appl. No. 15/175,495.
Int. Cl. H01L 21/768 (2006.01); H01L 23/528 (2006.01); H01L 23/522 (2006.01); H01L 21/311 (2006.01)
CPC H01L 23/5286 (2013.01) [H01L 21/31144 (2013.01); H01L 21/7684 (2013.01); H01L 21/76802 (2013.01); H01L 21/76807 (2013.01); H01L 21/76883 (2013.01); H01L 23/5226 (2013.01); H01L 23/5283 (2013.01)] 8 Claims
OG exemplary drawing
1. A method, comprising:
providing a starting interconnect structure for one or more semiconductor devices, the starting interconnect structure comprising a first metallization layer with a first power rail;
forming a second metallization layer over the first metallization layer with a second power rail;
directly electrically connecting the first power rail and the second power rail;
wherein the directly electrically connecting comprises forming a plurality of metal-filled vias between the first power rail and the second power rail;
forming at least one additional metallization layer over the second metallization layer with at least one additional power rail; and
directly electrically connecting each of the at least one additional power rail to a power rail of a metallization layer directly below.