US 9,812,391 B2
Advanced metallization for damage repair
Daniel C Edelstein, White Plains, NY (US); and Chih-Chao Yang, Glenmont, NY (US)
Assigned to International Business Machines Corporation, Armonk, NY (US)
Filed by International Business Machines Corporation, Armonk, NY (US)
Filed on Jun. 10, 2016, as Appl. No. 15/179,378.
Application 15/179,378 is a division of application No. 14/949,815, filed on Nov. 23, 2015.
Prior Publication US 2017/0148729 A1, May 25, 2017
Int. Cl. H01L 23/522 (2006.01); H01L 23/532 (2006.01); H01L 23/528 (2006.01)
CPC H01L 23/5226 (2013.01) [H01L 23/528 (2013.01); H01L 23/53266 (2013.01); H01L 23/53295 (2013.01); H01L 23/53214 (2013.01); H01L 23/53219 (2013.01); H01L 23/53228 (2013.01); H01L 23/53233 (2013.01)] 4 Claims
OG exemplary drawing
 
1. An electrical contact structure for an integrated circuit device, comprising;
a first patterned dielectric layer comprising a contact hole, the contact hole including a bottom surface, and sidewalls extending from the bottom surface to a top surface, wherein the bottom surface is in contact with a lower layer of the integrated circuit device;
a tungsten via disposed within the contact hole, the tungsten via having a bottom surface in contact with the lower layer and a top surface having etch damage;
a repair layer comprised of a tungsten nitride layer disposed on the top surface of the tungsten via which repairs the etch damage on the top surface of the tungsten via;
a second patterned dielectric layer which covers a first portion of the top surface of the tungsten via, wherein the tungsten nitride layer covers a second portion of the top surface of the tungsten via having etch damage, wherein the etch damage occurred when the second patterned dielectric layer was patterned;
a nitrogen enriched dielectric surface layer is formed on exposed surfaces of dielectric material;
a metal wire layer disposed over the second patterned dielectric layer and the tungsten nitride layer:
a metal diffusion barrier liner disposed over the tungsten nitride layer and the nitrogen enriched dielectric surface layer, wherein the metal diffusion barrier liner reacts with the underlying nitride layers to form a metal nitride;
wherein the contact hole is a first contact hole and the tungsten via is a first tungsten via, and the structure further comprises:
a second contact hole including a bottom surface, and sidewalls extending from the bottom surface to a top surface, wherein the bottom surface is in contact with the lower layer of the integrated circuit device;
a second tungsten via disposed within the second contact hole, the tungsten via having a bottom surface in contact with the lower layer and a top surface having etch damage;
a repair layer comprised of a tungsten nitride layer disposed on the top surface of the second tungsten via which repairs the etch damage on the top surface of the second tungsten via;
wherein the first tungsten via is disposed on a first side of a first portion of the first patterned dielectric layer and the second tungsten via is disposed on a second side of the first portion of the first patterned layer and wherein the second dielectric pattern which covers the first portion of the top surface of the first tungsten via also covers a first portion of the top surface of the second tungsten and a top surface of the first portion of the first patterned layer;
wherein the nitrogen enriched dielectric surface layer is disposed on the second dielectric layer and a second portion of the first patterned layer which is free from the second dielectric layer and wherein the metal diffusion barrier liner forms a continuous liner over the tungsten nitride repair layers over the first and second tungsten vias and the nitrogen enriched dielectric surface layer on the second portion of the first dielectric layer and the second dielectric pattern which covers the first portion of the first dielectric layer; and
wherein the metal wire layer forms a continuous layer over the first and second tungsten vias and the second dielectric pattern which covers the first portion of the dielectric layer and is in contact with the metal diffusion layer.