US 9,812,349 B2
Control of the incidence angle of an ion beam on a substrate
Ivelin Angelov, San Jose, CA (US); and Ivan L. Berry, III, San Jose, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Filed by Lam Research Corporation, Fremont, CA (US)
Filed on Dec. 1, 2015, as Appl. No. 14/956,154.
Prior Publication US 2017/0154804 A1, Jun. 1, 2017
Int. Cl. H01L 21/687 (2006.01); H01L 21/67 (2006.01); H01L 21/3065 (2006.01)
CPC H01L 21/68764 (2013.01) [H01L 21/3065 (2013.01); H01L 21/67069 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A method for processing a substrate, the method comprising:
loading a substrate on a substrate support within a chamber; and
causing, by a precession assembly, a precession motion of the substrate support, wherein the precession motion is imparted when the substrate is on the substrate support, the precession motion causing a rotating tilt of the substrate support without rotation of the substrate support, the rotating tilt of the substrate being configured to cause ions, generated by an ion source above the chamber, to impinge upon a surface of the substrate continually varying angles of incidence,
wherein the precession assembly includes a center support, a first actuator, and a second actuator, the center support being stationary in terms of up and down motion and coupled to a center point of an under region of the substrate support,
wherein the first actuator is connected to a first location that is in the under region of the substrate support and off-set from the center point, wherein the second actuator is connected to a second location that is in the under region of the substrate support and off-set from the center point,
wherein the precession motion is created when the first actuator and the second actuator move up and down relative to the center support, such that the first actuator moves up and down in accordance with a first frequency and the second actuator moves up and down in accordance with a second frequency, the first frequency being independently set relative to the second frequency;
wherein the first frequency is set to be temporally offset from the second frequency to produce the rotating tilt about the center support without said rotation of the substrate support.