US 9,812,343 B2
Load station
Leigh F. Sharrock, Londonderry, NH (US); Tsepa Bayul, Somerville, MA (US); Christopher J. Dancewicz, Methuen, MA (US); and Wayne A. Lasante, Littleton, MA (US)
Assigned to Brooks Automation, Inc., Chelmsford, MA (US)
Appl. No. 14/344,930
Filed by Leigh F. Sharrock, Londonderry, NH (US); Tsepa Bayul, Somerville, MA (US); Christopher J. Dancewicz, Methuen, MA (US); and Wayne A. Lasante, Littleton, MA (US)
PCT Filed Sep. 14, 2012, PCT No. PCT/US2012/055374
§ 371(c)(1), (2), (4) Date Jul. 10, 2014,
PCT Pub. No. WO2013/040330, PCT Pub. Date Mar. 21, 2013.
Claims priority of provisional application 61/534,681, filed on Sep. 14, 2011.
Prior Publication US 2015/0249029 A1, Sep. 3, 2015
Int. Cl. H01L 21/677 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/67706 (2013.01) [H01L 21/6773 (2013.01); H01L 21/67173 (2013.01); H01L 21/67276 (2013.01); H01L 21/67766 (2013.01); H01L 21/67769 (2013.01); H01L 21/67778 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate loading station comprising:
a frame forming a chamber configured to hold a controlled environment;
a transfer robot connected to the frame; and
one or more substrate cassette holding locations disposed on the frame and each being configured so as to hold a substrate cassette holder disposed within the frame, each of the one or more substrate cassette holding locations defining an interchangeable substrate cassette interface, that is interchangeable with other different interchangeable substrate cassette interfaces disposed coincidentally with each other on the frame, each of interchangeable substrate cassette interface and the other different interchangeable substrate cassette interface being configured to removably interface with and support a different corresponding substrate cassette holder of a different predetermined size in a predetermined position for substrate cassette communication with the transfer robot, to effect substrate transfer between a respective cassette and the transfer robot, where the interchangeable substrate cassette interface and the other different interchangeable substrate cassette interfaces of the one or more substrate cassette holding locations are selectively disposed at the one or more substrate cassette holding locations to effect interchangeability of one or more substrate cassette holders of a predetermined size with other substrate cassette holders of a different predetermined size and changing a substrate cassette holding capacity of substrate cassettes simultaneously held by the substrate loading station from a first maximum number of substrate cassettes held within the frame to a different second maximum number of substrate cassettes held within the frame, the frame being common to both the first maximum number of substrate cassettes and the different second maximum number of substrate cassettes, so that the substrate cassette holding capacity of the common frame has an interchangeable first maximum number of substrate cassette holding locations and a different second maximum number of substrate cassette holding locations.