US 9,812,331 B2
Apparatus for and method of processing substrate
Uihyoung Lee, Hwaseong-si (KR); Donghyun Lee, Gumi-si (KR); Jinhyoung Kim, Yongin-si (KR); Jaihyung Won, Seoul (KR); Sanghyun Lee, Suwon-si (KR); and Jinho Choi, Seongnam-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do (KR)
Filed on May 12, 2015, as Appl. No. 14/709,775.
Claims priority of application No. 10-2014-0056645 (KR), filed on May 12, 2014.
Prior Publication US 2015/0325490 A1, Nov. 12, 2015
Int. Cl. C25D 21/14 (2006.01); G05D 11/08 (2006.01); H01L 21/288 (2006.01); H01L 21/306 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); C25D 17/00 (2006.01); H01L 21/768 (2006.01)
CPC H01L 21/306 (2013.01) [C25D 17/001 (2013.01); C25D 21/14 (2013.01); H01L 21/2885 (2013.01); H01L 21/30604 (2013.01); H01L 21/67086 (2013.01); H01L 21/67253 (2013.01); H01L 22/26 (2013.01); H01L 21/76898 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A substrate processing apparatus, comprising:
a substrate processing unit to process a substrate using a processing solution containing a mixture of first and second sources;
a source supplying part directly connected into the substrate processing unit to supply the first and second sources to the substrate processing unit;
at least one analyzer connected into the substrate processing unit to measure a concentration of the second source in the processing solution or a pH value of the processing solution and adjust a measurement reference value of the second source in the processing solution using a standard solution, in which the first and second sources are mixed to have a predetermined concentration or pH value; and
a standard solution supplying part connected between the source supplying part and the at least one analyzer to prepare, on demand, the standard solution using the first and second sources supplied from the source supplying part, and to supply the standard solution to the at least one analyzer when the at least one analyzer requires calibration.