US 9,812,330 B2
Formulations for producing indium oxide-containing layers, process for producing them and their use
Juergen Steiger, Taipei (TW); Alexey Merkulov, Recklinghausen (DE); and Arne Hoppe, Herne (DE)
Assigned to Evonik Degussa GmbH, Essen (DE)
Appl. No. 14/900,821
Filed by Evonik Degussa GmbH, Essen (DE)
PCT Filed Apr. 28, 2014, PCT No. PCT/EP2014/058615
§ 371(c)(1), (2) Date Dec. 22, 2015,
PCT Pub. No. WO2014/206599, PCT Pub. Date Dec. 31, 2014.
Claims priority of application No. 10 2013 212 019.2 (DE), filed on Jun. 25, 2013.
Prior Publication US 2016/0141177 A1, May 19, 2016
Int. Cl. C07F 5/00 (2006.01); H01L 21/288 (2006.01); C23C 18/12 (2006.01); C23C 18/14 (2006.01); C23C 16/46 (2006.01); C23C 16/48 (2006.01); H01L 21/02 (2006.01); C23C 16/40 (2006.01)
CPC H01L 21/288 (2013.01) [C07F 5/00 (2013.01); C23C 16/407 (2013.01); C23C 16/46 (2013.01); C23C 16/48 (2013.01); C23C 18/1216 (2013.01); C23C 18/14 (2013.01); H01L 21/02381 (2013.01); H01L 21/02488 (2013.01); H01L 21/02565 (2013.01); H01L 21/02623 (2013.01); H01L 21/02628 (2013.01); H01L 21/02664 (2013.01)] 15 Claims
 
1. A liquid formulation, comprising:
at least one solvent; and
at least one indium alkoxide compound dissolved in the at least one solvent and having the formula [In6(O)(OR)12X6]2−Amz(ROH)x,
where R= alkyl, X= F, Cl, Br, and/or I, A= cation, z= valency of the cation, m·z= 2and x= 0 to 10.