US 9,812,303 B2
Configurable variable position closed track magnetron
Alan Ritchie, Menlo Park, CA (US); Ryan Hanson, Cupertino, CA (US); and Xianwei Zhao, Fremont, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Feb. 18, 2014, as Appl. No. 14/182,740.
Claims priority of provisional application 61/771,450, filed on Mar. 1, 2013.
Prior Publication US 2014/0246314 A1, Sep. 4, 2014
Int. Cl. C23C 14/34 (2006.01); H01J 37/34 (2006.01)
CPC H01J 37/3455 (2013.01) [H01J 37/3405 (2013.01); H01J 37/3452 (2013.01); H01J 37/3461 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A magnetron assembly, comprising:
a first base plate;
a second base plate having a limited range of motion with respect to the first base plate between a first position and a second position;
an outer magnetic pole in the shape of a loop and comprising an outer magnetic pole section coupled to the first base plate and an outer magnetic pole section coupled to the second base plate; and
an inner magnetic pole disposed within the outer magnetic pole, wherein the outer and inner magnetic poles define a closed loop magnetic field, and wherein the closed loop magnetic field is maintained when the second base plate is disposed in both the first position and the second position.