US 9,812,297 B2
Method of affixing heat transfer sheet
Keita Kanbara, Miyagi (JP); Naoyuki Satoh, Miyagi (JP); and Takuya Ishikawa, Miyagi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Jan. 21, 2014, as Appl. No. 14/159,535.
Claims priority of provisional application 61/758,466, filed on Jan. 30, 2013.
Claims priority of application No. 2013-010407 (JP), filed on Jan. 23, 2013.
Prior Publication US 2014/0202631 A1, Jul. 24, 2014
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32642 (2013.01) 9 Claims
OG exemplary drawing
 
1. A heat transfer sheet affixing method where a focus ring is pressed by a pressing part to a heat transfer sheet placed on a heat transfer sheet mounting part of a plasma processing apparatus to affix the heat transfer sheet to the focus ring, the method comprising:
reducing a pressure to place the heat transfer sheet in a reduced-pressure atmosphere;
heating the heat transfer sheet by a heating unit; and
pressing the focus ring by the pressing part to the heat transfer sheet, said pressing part including the heating unit,
wherein the heat transfer sheet is heated by the heating unit via the pressing part and the focus ring,
wherein the reducing, the heating, and the pressing are performed concurrently at least for a predetermined period of time,
wherein the pressing part has a disc-like shape;
in the pressing, an opposite surface of the pressing part, which is opposite to a contact surface of the pressing part contacting the focus ring, is pressed via an extendable bellows disposed along a circumferential direction of the pressing part to press the focus ring to the heat transfer sheet, said extendable bellows being arranged along a periphery of the pressing part,
wherein the method further comprises a controlling pressure inside of the extendable bellows and a pressure outside of the extendable bellows and pressing the focus ring against the heat transfer sheet by a pressure difference between the controlling pressure inside and the outside pressure of the extendable bellows in addition to the focus ring's own weight, wherein the extendable bellows is connected to an exhaust part and the extendable bellows is configured to have a vacuum state between the extendable bellows and the exhaust part,
wherein a pressure that the focus ring applies to the heat transfer sheet is adjusted by changing a position of the bellows,
wherein the heat transfer sheet is a polymer rubber in which a backbone is bonded by a siloxane bond and a methyl group is bonded as a side chain,
wherein said heating step heats the heat transfer sheet at such a temperature that the siloxane bond is not cut and the side chain is at least partially cut, and
wherein the heat transfer sheet affixing method is performed when a maintenance of the plasma processing apparatus is performed.