US 9,812,295 B1
Microwave chemical processing
Michael W. Stowell, Sunnyvale, CA (US)
Assigned to Lyten, Inc., Sunnyvale, CA (US)
Filed by Lyten, Inc., Sunnyvale, CA (US)
Filed on Nov. 15, 2016, as Appl. No. 15/351,858.
Int. Cl. H01J 37/32 (2006.01); C01B 31/02 (2006.01); C01B 31/04 (2006.01); C23C 16/511 (2006.01); B82Y 40/00 (2011.01); C23C 16/26 (2006.01); C23C 16/453 (2006.01); C23C 16/515 (2006.01); H01H 1/30 (2006.01); H01L 21/3213 (2006.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01); H01L 21/285 (2006.01); H05H 1/30 (2006.01)
CPC H01J 37/32192 (2013.01) [H01J 37/3244 (2013.01); B82Y 40/00 (2013.01); C01B 31/022 (2013.01); C01B 31/024 (2013.01); C01B 31/0206 (2013.01); C01B 31/0213 (2013.01); C01B 31/0293 (2013.01); C01B 31/04 (2013.01); C01B 31/0446 (2013.01); C23C 16/26 (2013.01); C23C 16/453 (2013.01); C23C 16/511 (2013.01); C23C 16/515 (2013.01); H01J 2237/332 (2013.01); H01J 2237/334 (2013.01); H01L 21/02274 (2013.01); H01L 21/28556 (2013.01); H01L 21/31116 (2013.01); H01L 21/32136 (2013.01); H05H 1/30 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A method comprising:
supplying pulsed microwave radiation through a waveguide having a length, the microwave radiation propagating in a direction along the waveguide;
providing a supply gas into the waveguide at a first location along the length of the waveguide, a majority of the supply gas flowing in the direction of the microwave radiation propagation;
generating a plasma in the supply gas in at least a portion of the length of the waveguide;
adding a process gas into the waveguide at a second location downstream from the first location, a majority of the process gas flowing in the direction of the microwave propagation at a flow rate of greater than 5 slm; and
controlling an average energy of the plasma to convert the process gas into separated components by controlling at least one of the group consisting of:
a pulsing frequency of the pulsed microwave radiation, wherein the pulsing frequency is greater than 500 Hz; and
a duty cycle of the pulsed microwave radiation, wherein the duty cycle is less than 90%;
wherein a pressure within the waveguide is at least 0.1 atmosphere, and
wherein the process gas is methane, and the separated components comprise hydrogen and a nanoparticulate carbon.