US 9,812,294 B2
Sub-pulsing during a state
John C. Valcore, Jr., Fremont, CA (US); Harmeet Singh, Fremont, CA (US); and Bradford J. Lyndaker, San Ramon, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Filed by Lam Research Corporation, Fremont, CA (US)
Filed on Jun. 2, 2016, as Appl. No. 15/172,004.
Application 15/172,004 is a division of application No. 14/466,724, filed on Aug. 22, 2014, granted, now 9,390,893.
Application 14/466,724 is a continuation in part of application No. 13/620,386, filed on Sep. 14, 2012, granted, now 9,197,196, issued on Nov. 24, 2015.
Application 13/620,386 is a continuation in part of application No. 13/531,491, filed on Jun. 22, 2012, granted, now 9,114,666, issued on Aug. 25, 2015.
Claims priority of provisional application 61/602,040, filed on Feb. 22, 2012.
Claims priority of provisional application 61/602,041, filed on Feb. 22, 2012.
Prior Publication US 2016/0276137 A1, Sep. 22, 2016
Int. Cl. H01J 37/32 (2006.01); H05H 1/24 (2006.01); H03L 7/00 (2006.01); H03K 3/01 (2006.01); H03L 7/06 (2006.01); H05H 1/46 (2006.01)
CPC H01J 37/32146 (2013.01) [H01J 37/3244 (2013.01); H01J 37/3255 (2013.01); H01J 37/32082 (2013.01); H01J 37/32174 (2013.01); H01J 37/32183 (2013.01); H03K 3/01 (2013.01); H03L 7/00 (2013.01); H03L 7/06 (2013.01); H01J 2237/327 (2013.01); H05H 2001/4682 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A radio frequency (RF) generator comprising:
a processor for:
receiving a clock signal from a clock source, the clock signal having two states;
generating a pulsed signal from the clock signal, the pulsed signal having sub-states within one of the states, the sub-states having a frequency greater than a frequency of the states; and
providing the pulsed signal to control power of an RF signal, the power controlled to be synchronous with the pulsed signal; and
an RF power supply coupled to the processor, the RF power supply for generating the RF signal having the power for providing the RF signal to a plasma chamber via an impedance matching circuit.