US 9,812,289 B2
Method for evaluating charged particle beam drawing apparatus
Satoru Hirose, Isogo-ku (JP); and Takayuki Ohnishi, Konan-ku (JP)
Assigned to NuFlare Technology, Inc., Yokohama-shi (JP)
Filed by NuFlare Technology, Inc., Yokohama-shi (JP)
Filed on Aug. 25, 2016, as Appl. No. 15/247,056.
Application 15/247,056 is a division of application No. 14/956,860, filed on Dec. 2, 2015, granted, now 9,514,915.
Claims priority of application No. 2015-024309 (JP), filed on Feb. 10, 2015.
Prior Publication US 2016/0365223 A1, Dec. 15, 2016
Int. Cl. H01J 37/00 (2006.01); H01J 37/304 (2006.01); H01J 37/317 (2006.01); H01J 37/04 (2006.01); H01J 37/147 (2006.01)
CPC H01J 37/304 (2013.01) [H01J 37/045 (2013.01); H01J 37/147 (2013.01); H01J 37/3045 (2013.01); H01J 37/3174 (2013.01); H01J 37/3175 (2013.01); H01J 2237/3045 (2013.01); H01J 2237/31776 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A method for evaluating a charged particle beam drawing apparatus which performs drawing with a charged particle beam shaped by using a first shaping aperture, a second shaping aperture, and a shaping deflector which deflects a charged particle beam passing through between the first shaping aperture and the second shaping aperture, the method comprising:
controlling an amount of deflection by the shaping deflector such that a shot size is increased, to draw a first pattern;
controlling the amount of deflection by the shaping deflector such that the shot size is decreased, to draw a second pattern;
measuring a dimension of the first pattern and a dimension of the second pattern;
calculating a first dimension variation amount as a difference between the measured dimension of the first pattern and a design dimension of the first pattern;
calculating a second dimension variation amount as a difference between the measured dimension of the second pattern and a design dimension of the second pattern;
calculating a total value as a sum of the first dimension variation amount and the second dimension variation amount; and
comparing the total value to a reference value.