US 9,812,288 B2
Sample holder with light emitting and transferring elements for a charged particle beam apparatus
Minami Shouji, Tokyo (JE); Takashi Ohshima, Tokyo (JP); Yuusuke Oominami, Tokyo (JP); Hideo Morishita, Tokyo (JP); and Kunio Harada, Tokyo (JP)
Assigned to Hitachi High-Technologies Corporation, Tokyo (JP)
Appl. No. 15/119,950
PCT Filed Jan. 9, 2015, PCT No. PCT/JP2015/050426
§ 371(c)(1), (2) Date Aug. 18, 2016,
PCT Pub. No. WO2015/125511, PCT Pub. Date Aug. 27, 2015.
Claims priority of application No. 2014-029106 (JP), filed on Feb. 19, 2014.
Prior Publication US 2017/0069458 A1, Mar. 9, 2017
Int. Cl. H01J 37/20 (2006.01); H01J 37/16 (2006.01); H01J 37/244 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/244 (2013.01) [H01J 37/20 (2013.01); H01J 37/26 (2013.01); H01J 2237/2445 (2013.01); H01J 2237/2808 (2013.01)] 18 Claims
OG exemplary drawing
1. A sample holder comprising:
a sample placement portion on which a light emitting member caused to emit light by charged particles that have traversed or scattered inside the sample; and
a light transferring member constituting a light transfer path for transferring light launched from a face non-parallel to a face of the light emitting member on which the sample is placed toward a detector.