US 9,812,285 B2
Holder assembly for cooperating with a nanoreactor and an electron microscope
Pleun Dona, Veldhoven (NL); and Luigi Mele, Eindhoven (NL)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Jul. 25, 2016, as Appl. No. 15/218,512.
Claims priority of application No. 16152964 (EP), filed on Jan. 27, 2016.
Prior Publication US 2017/0213691 A1, Jul. 27, 2017
Int. Cl. H01J 37/30 (2006.01); G21K 5/08 (2006.01); G01N 21/05 (2006.01); H01J 37/16 (2006.01); H01J 37/20 (2006.01)
CPC H01J 37/16 (2013.01) [H01J 37/20 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A holder assembly for cooperating with a nanoreactor and an electron microscope, the electron microscope in working irradiating the nanoreactor with a beam of electrons, said holder assembly having a distal end for holding the nanoreactor, the nanoreactor having a first flat layer with a first electron transparent window, and a second flat layer having a second electron transparent window, the first flat layer and the second flat layer enclosing an enclosed volume, the first electron transparent window aligned with the second electron transparent window, the first flat layer having a fluid inlet for entering a fluid into the enclosed volume, the distal end of the holder assembly in working placed in an evacuated part of the electron microscope, the nanoreactor in working attached to the distal end, the distal end having a central hole for passing the beam of electrons, said central hole in working aligned with the first electron transparent window and the second electron transparent window of the nanoreactor, the distal end having a fluid supply channel in working connected to the fluid inlet, the fluid supply channel supplying a fluid, the connection between the fluid inlet and the fluid supply channel in working sealed by a fluid supply sealing element, wherein
the holder assembly comprises a recess that, when the nanoreactor is attached to the holder assembly, forms a sealed pre-vacuum volume between the distal end and the first flat layer, the pre-vacuum volume evacuated via a pre-vacuum channel ending in the recess, and the fluid supply sealing element is exposed to the evacuated pre-vacuum volume such that any leakage of the fluid via the fluid supply sealing element is pumped away via the pre-vacuum channel without entering the evacuated part of the electron microscope.