US 9,812,156 B2
Thermally-assisted magnetic recording head including a main pole and a plasmon generator
Yoshitaka Sasaki, Santa Clara, CA (US); Hiroyuki Ito, Milpitas, CA (US); Shigeki Tanemura, Milpitas, CA (US); Hideo Mamiya, Milpitas, CA (US); Hironori Araki, Milpitas, CA (US); and Seiichiro Tomita, Milpitas, CA (US)
Assigned to HEADWAY TECHNOLOGIES, INC., Milpitas, CA (US)
Filed by Yoshitaka Sasaki, Santa Clara, CA (US); Hiroyuki Ito, Milpitas, CA (US); Shigeki Tanemura, Milpitas, CA (US); Hideo Mamiya, Milpitas, CA (US); Hironori Araki, Milpitas, CA (US); and Seiichiro Tomita, Milpitas, CA (US)
Filed on Jan. 20, 2015, as Appl. No. 14/600,460.
Prior Publication US 2016/0210994 A1, Jul. 21, 2016
Int. Cl. G11B 5/127 (2006.01); G11B 5/31 (2006.01); G11B 5/60 (2006.01); G11B 5/00 (2006.01); G11B 5/012 (2006.01)
CPC G11B 5/314 (2013.01) [G11B 5/127 (2013.01); G11B 5/6088 (2013.01); G11B 5/012 (2013.01); G11B 5/1272 (2013.01); G11B 2005/0021 (2013.01)] 11 Claims
OG exemplary drawing
 
11. A method of manufacturing a thermally-assisted magnetic recording head, the method comprising:
forming a waveguide including a core and a cladding, the core allowing light to propagate therethrough, the cladding being provided around the core;
forming a plasmon generator and a main pole; and
forming a coil for producing a magnetic field corresponding to data to be written on a recording medium where a medium facing surface is configured to face the recording medium, wherein
the step of forming the plasmon generator and the main pole includes the steps of:
forming an initial plasmon generator;
forming an etching mask for use to pattern the initial plasmon generator;
etching the initial plasmon generator into the plasmon generator by using the etching mask, the plasmon generator having a near-field light generating surface located in the medium facing surface;
forming a surrounding layer of a dielectric material around the plasmon generator and the etching mask after the step of etching the initial plasmon generator;
removing the etching mask so that a recess is formed by the plasmon generator and the surrounding layer; and
forming a magnetic layer such that a portion thereof is received in the recess, the magnetic layer being intended for use to form the main pole, the main pole having a front end face located in the medium facing surface,
the main pole is configured to pass a magnetic flux corresponding to the magnetic field produced by the coil, and to produce from the front end face a write magnetic field for writing the data on the recording medium,
the plasmon generator is configured to excite a surface plasmon on the plasmon generator based on the light propagating through the core, and to generate near-field light from the near-field light generating surface based on the surface plasmon,
the front end face of the main pole and the near-field light generating surface are at locations different from each other in a direction of travel of the recording medium,
the front end face of the main pole includes a first end face portion, and a second end face portion contiguous with the first end face portion,
the second end face portion is located farther from the near-field light generating surface than is the first end face portion, and is greater than the first end face portion in width in a track width direction,
the first end face portion has a first edge and a second edge opposite to each other in the track width direction,
the near-field light generating surface has a third edge and a fourth edge opposite to each other in the track width direction, and a fifth edge and a sixth edge opposite to each other in the direction of travel of the recording medium,
an entire shape of the near-field light generating surface defined by the third to sixth edges is rectangular,
the first edge and the third edge are located on a first imaginary straight line,
the second edge and the fourth edge are located on a second imaginary straight line parallel to the first imaginary straight line, and
the first edge and the second edge are straight lines parallel to each other in a plane of the front end face.