US 9,811,096 B2
Liquid feeding device and substrate treating device
Konosuke Hayashi, Yokohama (JP); Takashi Ootagaki, Yokohama (JP); and Emi Matsui, Yokohama (JP)
Assigned to SHIBAURA MECHATRONICS CORPORATION, Kanagawa (JP)
Filed by SHIBAURA MECHATRONICS CORPORATION, Yokohama-shi, Kanagawa (JP)
Filed on Nov. 12, 2015, as Appl. No. 14/939,008.
Application 14/939,008 is a continuation of application No. PCT/JP2014/062878, filed on May 14, 2014.
Claims priority of application No. 2013-102460 (JP), filed on May 14, 2013.
Prior Publication US 2016/0062372 A1, Mar. 3, 2016
Int. Cl. G05D 11/13 (2006.01); B05B 12/00 (2006.01); G05D 9/12 (2006.01); B05C 5/02 (2006.01); H01L 21/67 (2006.01); B05B 13/02 (2006.01)
CPC G05D 11/13 (2013.01) [B05B 12/006 (2013.01); B05C 5/02 (2013.01); G05D 9/12 (2013.01); H01L 21/6708 (2013.01); H01L 21/67017 (2013.01); B05B 13/0242 (2013.01)] 12 Claims
OG exemplary drawing
 
5. A substrate treating device that treats a substrate with a treatment liquid, the device comprising:
a rotation table removably holding the substrate and driven to rotate the substrate;
a feeding nozzle arranged above the rotation table to feed the treatment liquid to the substrate;
a plurality of feeding tanks that accommodate the treatment liquid, each including a closed container having an upper portion to which an exhaust passage is connected, and switchable between a feeding mode in which the treatment liquid is fed and a standby mode in which the feeding tank is on standby while accommodating the treatment liquid;
a feeding section configured to feed the treatment liquid to the feeding nozzle from any one of the plurality of the feeding tanks in the feeding mode;
a recovery section configured to recover and return excess treatment liquid fed by the feeding nozzle to the substrate to any one of the plurality of the feeding tanks in the feeding mode; and
an on-off valve device provided in each of the plurality of feeding tanks to block the exhaust passage,
wherein the respective on-off valve device seals the exhaust passage of the respective feeding tank in the standby mode and opens the respective exhaust passage of the respective feeding tank in the feeding mode.