US 9,811,006 B2
Method of determining a measurement subset of metrology points on a substrate, associated apparatus and computer program
Jochem Sebastiaan Wildenberg, Aarle-Rixtel (NL); and Everhardus Cornelis Mos, Best (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 15/111,763
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Nov. 4, 2014, PCT No. PCT/EP2014/073645
§ 371(c)(1), (2) Date Jul. 14, 2016,
PCT Pub. No. WO2015/110191, PCT Pub. Date Jul. 30, 2015.
Claims priority of application No. 14152423 (EP), filed on Jan. 24, 2014.
Prior Publication US 2016/0334717 A1, Nov. 17, 2016
Int. Cl. G01B 11/00 (2006.01); G03B 27/32 (2006.01); G03B 27/68 (2006.01); G03F 7/20 (2006.01); G03F 9/00 (2006.01); G01B 11/27 (2006.01)
CPC G03F 7/70775 (2013.01) [G01B 11/272 (2013.01); G03F 7/70625 (2013.01); G03F 7/70633 (2013.01); G03F 7/70683 (2013.01); G03F 9/7003 (2013.01); G03F 9/7046 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of determining a measurement subset of metrology point locations, the measurement subset comprising a subset of potential metrology point locations on a substrate, and the method comprising:
identifying a plurality of candidate metrology point locations from the potential metrology point locations;
evaluating for each of the candidate metrology point locations, a change in the level of informativity imparted by the measurement subset of metrology point locations which is attributable to the inclusion of that candidate metrology point location into the measurement subset of metrology point locations; and
selecting for inclusion into the measurement subset of metrology point locations, those one or more candidate metrology point locations which have the greatest increase in the level of informativity attributed thereto,
wherein an exclusion zone is defined in the vicinity of each of the metrology point locations selected for inclusion into the measurement subset of metrology point locations, and the candidate metrology point locations comprise only potential metrology point locations located outside of these exclusion zones.