US 9,810,979 B2
Imprint apparatus and article manufacturing method
Tadashi Hattori, Utsunomiya (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by Tadashi Hattori, Utsunomiya (JP)
Filed on Jul. 5, 2012, as Appl. No. 13/541,899.
Claims priority of application No. 2011-157123 (JP), filed on Jul. 15, 2011.
Prior Publication US 2013/0015597 A1, Jan. 17, 2013
Int. Cl. B29C 59/02 (2006.01); G03F 7/00 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01)
CPC G03F 7/0002 (2013.01) [B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); B29C 2059/023 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An imprint apparatus for performing an imprint process of forming a pattern on a substrate by molding an imprint material on the substrate with a mold, the apparatus comprising:
a mold holder configured to hold the mold;
a substrate holder configured to hold the substrate;
a first driving mechanism configured to move at least one of the mold holder and the substrate holder along a driving axis such that the mold and the imprint material are brought into contact with each other;
a second driving mechanism configured to move at least one of the mold holder and the substrate holder along a plane with which the driving axis intersects, such that the substrate is aligned with the mold;
a measurement device, which includes a scope, configured to measure, via the scope and through the mold, a relative position, along the plane, between a mold mark formed on the mold and a substrate mark formed on the substrate in a state in which the mold and the imprint material are not in contact with each other; and
a controller configured to control the second driving mechanism based on (i) information of a relationship between a moving amount and a change, the moving amount being a moving amount along the driving axis of at least one of the mold holder and the substrate holder, the change being change in the relative position along the plane between the mold mark and the substrate mark, (ii) information of the moving amount, and (iii) information of the relative position obtained by the measurement device before moving of at least one of the mold holder and the substrate holder by the first driving mechanism by the moving amount is started.