US 9,810,901 B2
Apparatus and method for driving and measuring a MEMS mirror system
Christian Hambeck, Gerersdorf (AT); Joerg Reitterer, Vienna (AT); and Franz Fidler, Vienna (AT)
Assigned to TriLite Technologies GmbH, Vienna (AT)
Filed by TriLite Technologies GmbH, Neutal (AT)
Filed on Apr. 22, 2015, as Appl. No. 14/692,985.
Claims priority of application No. 14166714 (EP), filed on Apr. 30, 2014.
Prior Publication US 2015/0316762 A1, Nov. 5, 2015
Int. Cl. G02B 26/08 (2006.01)
CPC G02B 26/0833 (2013.01) [G02B 26/085 (2013.01)] 20 Claims
OG exemplary drawing
1. An apparatus for driving and measuring a MEMS mirror system, the MEMS mirror system having a mirror pivotable around an axis by a driving coil and exhibiting a resonance frequency, comprising:
a pulse generator and a measuring unit, each electrically connected to the coil;
the pulse generator being configured to feed a modulated pulse signal, comprised of pulses separated by intervals and having a modulation frequency different from the resonance frequency, to the coil;
the measuring unit being configured to measure a value of a signal output by the coil during an interval of the modulated pulse signal; and
an integrator connected to the measuring unit, the integrator being configured to integrate a series of signal values output by the measuring unit.