US 9,810,890 B2
Collector
Markus Deguenther, Aalen (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Mar. 4, 2016, as Appl. No. 15/61,597.
Application 15/061,597 is a continuation of application No. PCT/EP2014/067963, filed on Aug. 25, 2014.
Claims priority of application No. 10 2013 218 132 (DE), filed on Sep. 11, 2013.
Prior Publication US 2016/0187632 A1, Jun. 30, 2016
Int. Cl. G02B 27/54 (2006.01); G02B 19/00 (2006.01); G03F 7/20 (2006.01); G02B 5/09 (2006.01); G21K 1/06 (2006.01)
CPC G02B 19/0023 (2013.01) [G02B 5/09 (2013.01); G02B 19/0095 (2013.01); G03F 7/702 (2013.01); G03F 7/70075 (2013.01); G03F 7/70175 (2013.01); G21K 1/06 (2013.01); G21K 2201/064 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A collector configured to transfer EUV illumination light from a radiation source region toward illumination optics configured to guide the EUV illumination light toward an object field, wherein:
the collector configured for reflecting guidance of the EUV illumination light with angles of incidence less than 45°;
the collector comprises collector imaging optics configured to image the radiation source region into a focal region disposed downstream collector imaging optics;
the collector imaging optics are configured so that during use of the collector:
the radiation source is imaged into the focal region with a first imaging scale via EUV illumination light emitted by a radiation source region with beam angles less than 20° with respect to an optical axis between the radiation source region and the focal region; and
the radiation source is imaged into the focal region with a second imaging scale via EUV illumination light emitted by the radiation source region with beam angles greater than 70° with respect to the optical axis between the radiation source region and the focal region; and
the first and second imaging scales differ by no more than a factor of 2.5.