US 9,810,808 B2
Oscillation device and measurement apparatus using the same
Yoshinori Tateishi, Naka-gun (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Oct. 18, 2016, as Appl. No. 15/296,670.
Claims priority of application No. 2015-206695 (JP), filed on Oct. 20, 2015.
Prior Publication US 2017/0108613 A1, Apr. 20, 2017
Int. Cl. G01J 5/02 (2006.01); G01V 8/00 (2006.01); H01S 1/02 (2006.01)
CPC G01V 8/005 (2013.01) [H01S 1/02 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An oscillation device comprising:
a waveguide structure including a first conductor layer, a second conductor layer, and a semiconductor layer disposed between the first conductor layer and the second conductor layer and having a gain of an electromagnetic wave;
an antenna unit configured to radiate the electromagnetic wave;
a first connecting portion configured to connect the waveguide structure and the antenna unit; and
a second connecting portion configured to connect the waveguide structure and the antenna unit,
wherein a first connecting position of the first connecting portion and the waveguide structure and a second connecting position of the second connecting portion and the waveguide structure are different from each other in a resonance direction in which the electromagnetic wave that resonates the waveguide structure resonates.