US 9,810,791 B2
Radiation detector and method for manufacturing the same
Katsuhisa Homma, Ootawara (JP)
Assigned to Toshiba Electron Tubes & Devices Co., Ltd., Otawara-shi (JP)
Filed by Toshiba Electron Tubes & Devices Co., Ltd., Otawara-shi (JP)
Filed on Dec. 8, 2015, as Appl. No. 14/962,730.
Application 14/962,730 is a continuation of application No. PCT/JP2014/065125, filed on Jun. 6, 2014.
Claims priority of application No. 2013-124655 (JP), filed on Jun. 13, 2013.
Prior Publication US 2016/0091616 A1, Mar. 31, 2016
Int. Cl. G01T 1/20 (2006.01); G01T 1/202 (2006.01)
CPC G01T 1/2018 (2013.01) [G01T 1/202 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A radiation detector comprising:
an array substrate comprising a photoelectric conversion element;
a scintillator layer formed on the photoelectric conversion element and converting radiation to fluorescence; and
a composite layer comprising a surface-smoothing layer and a moisture-proof layer, the surface-smoothing layer being a continuous film formed to cover the scintillator layer and comprising an organic resin material and, dispersed therein, light scattering particles, the moisture-proof layer being a continuous film formed on a surface of the surface-smoothing layer by direct film formation and consisting of inorganic material,
wherein the surface-smoothing layer has:
a higher volume fraction of the light scattering particles on a side nearer to the scintillator layer and a lower volume fraction of the light scattering particles on a side nearer to the moisture-proof layer, and
a thickness that is not less than an unevenness of the scintillator layer.