US 9,810,713 B2
Method and apparatus of operating a scanning probe microscope
Jian Shi, Ventura, CA (US); Yan Hu, Ventura, CA (US); Shuiqing Hu, Santa Barbara, CA (US); Ji Ma, Thousand Oaks, CA (US); and Chanmin Su, Ventura, CA (US)
Assigned to Bruker Nano, Inc., Santa Barbara, CA (US)
Filed by Bruker Nano, Inc., Santa Barbara, CA (US)
Filed on Mar. 1, 2016, as Appl. No. 15/57,963.
Application 15/057,963 is a division of application No. 14/172,710, filed on Feb. 4, 2014, granted, now 9,274,139, issued on Mar. 1, 2016.
Application 14/172,710 is a division of application No. 12/958,323, filed on Dec. 1, 2010, granted, now 8,646,109, issued on Feb. 4, 2014.
Application 12/958,323 is a continuation in part of application No. 12/618,641, filed on Nov. 13, 2009, granted, now 8,739,309, issued on May 27, 2014.
Claims priority of provisional application 61/265,655, filed on Dec. 1, 2009.
Claims priority of provisional application 61/114,399, filed on Nov. 13, 2008.
Prior Publication US 2016/0258979 A1, Sep. 8, 2016
Int. Cl. G01Q 20/00 (2010.01); B82Y 35/00 (2011.01); G01Q 10/06 (2010.01); G01Q 60/32 (2010.01); G01Q 20/02 (2010.01); G01Q 60/30 (2010.01); G01Q 60/34 (2010.01)
CPC G01Q 20/00 (2013.01) [B82Y 35/00 (2013.01); G01Q 10/065 (2013.01); G01Q 20/02 (2013.01); G01Q 60/30 (2013.01); G01Q 60/32 (2013.01); G01Q 60/34 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A method for monitoring effectiveness of a scanning probe microscope (SPM), the method comprising:
providing relative motion between a probe and a sample and controlling that motion using a feedback loop in peak force tapping (PFT) mode;
detecting an attractive force between the probe and the sample; and
comparing the attractive force to a predetermined threshold in real time with operation of the controlling step.