US 9,810,712 B2
Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body
Satoru Tanaka, Chino (JP)
Assigned to Seiko Epson Corporation, (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Aug. 10, 2015, as Appl. No. 14/822,041.
Claims priority of application No. 2014-165431 (JP), filed on Aug. 15, 2014; application No. 2014-166926 (JP), filed on Aug. 19, 2014; application No. 2014-166927 (JP), filed on Aug. 19, 2014; and application No. 2015-114928 (JP), filed on Jun. 5, 2015.
Prior Publication US 2016/0047839 A1, Feb. 18, 2016
Int. Cl. G01P 15/125 (2006.01); G01C 19/5755 (2012.01); G01C 19/5769 (2012.01); G01P 15/08 (2006.01)
CPC G01P 15/125 (2013.01) [G01C 19/5755 (2013.01); G01C 19/5769 (2013.01); G01P 2015/0831 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A physical quantity sensor comprising:
a substrate;
a support section which is fixed to the substrate;
a movable section which is connected to the support section through a connection portion and can oscillate with respect to the support section; and
a fixed electrode which is disposed on the substrate to face the movable section,
wherein the movable section includes a first mass portion which is provided on one side with respect to the connection portion, a second mass portion which is provided on the other side and has larger mass than the first mass portion, a first movable electrode disposed in the first mass portion, and a second movable electrode disposed in the second mass portion,
the fixed electrode includes a first fixed electrode which is disposed to face the first mass portion, a second fixed electrode which is disposed to face the second mass portion, and a dummy electrode which is disposed to face the movable section so as not to come into contact with the first fixed electrode and the second fixed electrode and has the same potential as potential of the movable section,
the dummy electrode includes a first dummy electrode provided between the first fixed electrode and the second fixed electrode, a second dummy electrode provided on the side opposite to the first dummy electrode, of the first fixed electrode, and a third dummy electrode provided on the side opposite to the first dummy electrode, of the second fixed electrode, and the fixed electrode and the dummy electrode are disposed such that a capacity offset is smaller than a capacity offset in a case where distances between the first fixed electrode and the first and second dummy electrodes and distances between the second fixed electrode and the first and third dummy electrodes are the same.