US 9,810,711 B2
Inertial sensor
Hideaki Fukuzawa, Kawasaki Kanagawa (JP); Michiko Hara, Yokohama Kanagawa (JP); Yoshihiko Fuji, Kawasaki Kanagawa (JP); Yoshihiro Higashi, Komatsu Ishikawa (JP); Shiori Kaji, Kawasaki Kanagawa (JP); Akio Hori, Kawasaki Kanagawa (JP); Tomohiko Nagata, Yokohama Kanagawa (JP); Akiko Yuzawa, Kawasaki Kanagawa (JP); and Akira Kikitsu, Yokohama Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Aug. 15, 2014, as Appl. No. 14/460,450.
Claims priority of application No. 2013-196056 (JP), filed on Sep. 20, 2013.
Prior Publication US 2015/0082886 A1, Mar. 26, 2015
Int. Cl. G01P 15/08 (2006.01); G01P 15/105 (2006.01)
CPC G01P 15/105 (2013.01) [G01P 15/0802 (2013.01); G01P 2015/0805 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An inertial sensor comprising:
a base portion;
a weight portion;
a connection portion connecting the weight portion and the base portion, the connection portion being configured to be deformed in accordance with a change in a relative position of the weight portion with respect to a position of the base portion; and
a first sensing element unit provided on a first portion of the connection portion and including a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer, the nonmagnetic first intermediate layer being provided between the first magnetic layer and the second magnetic layer;
a second sensing element unit including a third magnetic layer, a fourth magnetic layer, and a nonmagnetic second intermediate layer, the nonmagnetic second intermediate layer being provided between the third magnetic layer and the fourth magnetic layer,
the connection portion further including a second portion, the second sensing element unit being provided on the second portion, and
a first direction being at an angle with respect to a second direction, the angle being greater than 0° and less than 90°, or greater than 90° and less than 180°, the first direction being from a position of a centroid of the weight portion in a first plane toward a position of the first portion in the first plane, the plane including a third direction from the base portion toward the weight portion and a fourth direction from the first portion toward the second portion, the second direction being from the position of the centroid of the weight portion in the plane toward a position of the second portion in the plane,
wherein a length of the first portion of the connection portion along a fifth direction from the first magnetic layer toward the second magnetic layer is shorter than a length of the weight portion along the fifth direction,
the first magnetic layer extends along a first extending direction crossing the fifth direction and a length of the first magnetic layer in the first extending direction is longer than a length of the first magnetic layer in a sixth direction crossing the fifth direction and crossing the first extending direction,
the third magnetic layer extends along a third extending direction crossing a seventh direction from the third magnetic layer toward the fourth magnetic layer and a length of the third magnetic layer in the third extending direction is longer than a length of the third magnetic layer in a direction crossing the seventh direction and crossing the third extending direction,
the first extending direction is inclined to the first direction,
the third extending direction is inclined to the second direction, and
a difference between a first angle from the first direction to the first extending direction and a second angle from the second direction to the third extending direction is 10 degrees or less.