US 9,810,653 B2
Integrated SMO gas sensor module
Ravi Shankar, Singapore (SG); Olivier Le Neel, Singapore (SG); Tien-Choy Loh, Singapore (SG); and Shian-Yeu Kam, Singapore (SG)
Filed by STMicroelectronics Pte Ltd, Singapore (SG)
Filed on Jul. 17, 2014, as Appl. No. 14/334,572.
Prior Publication US 2016/0018356 A1, Jan. 21, 2016
Int. Cl. G01N 27/12 (2006.01)
CPC G01N 27/12 (2013.01) [G01N 27/123 (2013.01); G01N 27/125 (2013.01); G01N 27/128 (2013.01)] 28 Claims
OG exemplary drawing
1. A device, comprising:
a substrate;
a thin film resistive semiconductor metal oxide (SMO) sensor over the substrate;
a resistive heater over the substrate and disposed adjacent to the thin film resistive SMO sensor;
a resistive temperature sensor over the substrate and disposed adjacent to the resistive heater; and
a thermal insulation structure in the substrate between the resistive heater and the substrate, the thermal insulation structure including support pillars surrounded by an air gap.