US 9,810,649 B2
X-ray fluorescence analyzer
Toshiyuki Takahara, Tokyo (JP); Hiroyuki Noda, Tokyo (JP); and Ai Masuda, Tokyo (JP)
Assigned to Hitachi High-Tech Science Corporation, (JP)
Filed on Dec. 1, 2015, as Appl. No. 14/956,370.
Claims priority of application No. 2014-245524 (JP), filed on Dec. 4, 2014.
Prior Publication US 2016/0161428 A1, Jun. 9, 2016
Int. Cl. G01N 23/22 (2006.01); G01N 23/207 (2006.01); G01N 23/223 (2006.01); G21F 3/00 (2006.01)
CPC G01N 23/223 (2013.01) [G21F 3/00 (2013.01); G01N 2223/076 (2013.01); G01N 2223/30 (2013.01); G01N 2223/6113 (2013.01)] 8 Claims
OG exemplary drawing
1. An X-ray fluorescence analyzer comprising:
a sample stage having a mounting surface on which a sample is mounted;
an X-ray source configured to irradiate the sample with primary X-rays and disposed immediately above an irradiation position of the sample;
a detector configured to detect fluorescent X-rays emitted from the sample irradiated with the primary X-rays;
a shielding container configured to accommodate the sample stage, the X-ray source, and the detector and includes:
a sample chamber configured to accommodate the sample stage;
a door provided at a top of the sample chamber and configured to open and close at least a front half of the sample chamber,
wherein the X-ray source and the detector are disposed at a rear half of the sample chamber;
a hood section disposed on the shielding container at the rear half thereof and connected to the shielding container; and
a vertical moving mechanism configured to vertically move the X-ray source and the detector and move the X-ray source and the detector between a first position inside the shielding container and a second position inside the hood section.