US 9,810,648 B2
X-ray fluorescence analyzer and X-ray fluorescence analyzing method
Toshiyuki Takahara, Tokyo (JP)
Assigned to HITACHI HIGH-TECH SCIENCE CORPORATION, Tokyo (JP)
Filed by HITACHI HIGH-TECH SCIENCE CORPORATION, Tokyo (JP)
Filed on Nov. 21, 2015, as Appl. No. 14/948,297.
Claims priority of application No. 2014-238669 (JP), filed on Nov. 26, 2014.
Prior Publication US 2016/0146745 A1, May 26, 2016
Int. Cl. G01N 23/223 (2006.01); H01J 35/16 (2006.01)
CPC G01N 23/223 (2013.01) [H01J 35/16 (2013.01); G01N 2223/076 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An X-ray fluorescence analyzer comprising:
a sample stage having a mounting surface on which a sample is mounted;
an X-ray source configured to irradiate the sample with the primary X-rays and disposed immediately above an irradiation position of the sample;
a detector configured to detect fluorescent X-rays emitted from the sample irradiated with the primary X-rays;
an X stage configured to move the sample stage in an X direction that is parallel to the mounting surface;
a Y stage configured to move the sample stage in a Y direction that is parallel to the mounting surface and perpendicular to the X direction;
a θ stage configured to have a rotation center at the center of the mounting surface and to rotate the sample stage around a rotation axis perpendicular to the mounting surface; and
a shielding container configured to accommodate the sample stage, the X-ray source, the detector, the X stage, the Y stage, and the θ stage,
wherein the irradiation position with the primary X-rays is set at an offset position from a movement center of the X stage and the Y stage,
wherein an irradiation area that is irradiatable with the primary X-rays is set to a selected segmented area, in which the irradiation position is disposed, from among segmented areas that are defined by segmenting the surface of the sample into four parts with a virtual segment line in the X direction and a virtual segment line in the Y direction passing through the movement center when the X stage and the Y stage are moved in a state in which the θ stage is not moved, and
wherein the θ stage is configured to switch the selected segmented area as the irradiation area into any one of the segmented areas by rotating the sample stage by every 90 degrees.