US 9,810,647 B2
Enclosed X-ray imaging system
Kazuaki Suzuki, Berkhamsted Hertfordshire (GB); and Daniel Hilton, Aylesbury Hertfordshire (GB)
Assigned to NIKO METROLOGY NV, Leuven (BE)
Appl. No. 14/890,394
Filed by NIKON METROLOGY NV, Leuven (BE)
PCT Filed May 12, 2014, PCT No. PCT/EP2014/059619
§ 371(c)(1), (2) Date Nov. 10, 2015,
PCT Pub. No. WO2014/184127, PCT Pub. Date Nov. 20, 2014.
Claims priority of application No. 1308597.2 (GB), filed on May 13, 2013.
Prior Publication US 2016/0109389 A1, Apr. 21, 2016
Int. Cl. G01N 23/04 (2006.01)
CPC G01N 23/046 (2013.01) [G01N 2223/1016 (2013.01); G01N 2223/31 (2013.01); G01N 2223/419 (2013.01)] 27 Claims
OG exemplary drawing
1. A computed tomography (CT) x-ray imaging apparatus, comprising:
an x-ray source;
an x-ray detector;
a sample mount for mounting a sample in a beam path between the x-ray source and the x-ray detector;
an enclosure enclosing at least the sample mount in an interior of the enclosure; and
a climate control system for regulating the climate inside the enclosure, wherein:
the enclosure has an aperture for enabling access to at least the sample mount from outside the enclosure;
the enclosure is provided with a door operable between an open position in which the aperture is open and a closed position in which the aperture is closed by the door; and
the climate control system is operable to provide a positive pressure differential between the interior of the enclosure and an exterior of the enclosure such that the interior of the enclosure is maintained at a higher pressure than the exterior of the enclosure when the door is open.