US 9,810,620 B2
Multi-layered target design
Nuriel Amir, St. Yokne'am (IL)
Assigned to KLA-Tencor Corporation, Milpitas, CA (US)
Filed by KLA-TENCOR CORPORATION, Milpitas, CA (US)
Filed on Feb. 12, 2015, as Appl. No. 14/620,992.
Application 14/620,992 is a continuation of application No. PCT/US2014/039833, filed on May 28, 2014.
Claims priority of provisional application 61/828,578, filed on May 29, 2013.
Prior Publication US 2015/0153268 A1, Jun. 4, 2015
Int. Cl. G01J 1/10 (2006.01); G01N 21/01 (2006.01); G03F 7/20 (2006.01); G01N 21/95 (2006.01); G06F 17/50 (2006.01)
CPC G01N 21/01 (2013.01) [G01N 21/9501 (2013.01); G03F 7/70616 (2013.01); G06F 17/5072 (2013.01); G06F 17/5081 (2013.01); G01N 2201/02 (2013.01); G01N 2201/12 (2013.01); Y10T 428/2457 (2015.01)] 39 Claims
OG exemplary drawing
 
1. A multi-layered target comprising:
a first process layer including a first plurality of process layer segmentation features;
at least a second process layer including at least a second plurality of process layer segmentation features, wherein the at least a second process layer overlaps the first process layer at a plurality of target regions, wherein the first plurality of process segmentation features are substantially parallel to the at least a second plurality of process layer segmentation features within the plurality of target regions; and
at least one target layer including a plurality of target elements, wherein each of the plurality of target elements are surrounded by an optically contrasting periphery element, wherein the at least one target layer overlaps the first process layer and the at least a second process layer at the plurality of target regions, wherein the plurality of target elements are substantially perpendicular to the first plurality of process layer segmentation features and the at least a second plurality of process layer segmentation features within the plurality of target regions,
wherein the area of each of the plurality of target regions is defined by the area of a target element and surrounding periphery element.