US 9,810,617 B2
Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure
Cindy Thovex, La Clusaz (FR); Julien Bounouar, Annecy (FR); and Arnaud Favre, Annecy (FR)
Assigned to ADIXEN VACUUM PRODUCTS, Annecy (FR)
Appl. No. 14/441,669
Filed by ADIXEN VACUUM PRODUCTS, Annecy (FR)
PCT Filed Nov. 29, 2013, PCT No. PCT/EP2013/075075
§ 371(c)(1), (2) Date May 8, 2015,
PCT Pub. No. WO2014/083151, PCT Pub. Date Jun. 5, 2014.
Claims priority of application No. 12 61451 (FR), filed on Nov. 30, 2012.
Prior Publication US 2015/0276572 A1, Oct. 1, 2015
Int. Cl. G01N 15/10 (2006.01); H01L 21/673 (2006.01)
CPC G01N 15/10 (2013.01) [H01L 21/67389 (2013.01); G01N 2015/1062 (2013.01)] 16 Claims
OG exemplary drawing
 
1. Station for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure, said transport carrier comprising a rigid casing containing an aperture and a removable door allowing the aperture to be closed, the measuring station comprising:
a controlled environment chamber comprising at least one load port capable of coupling to the rigid casing or to the door of the transport carrier, in order to move the door into the controlled environment chamber and bring the interior of the rigid casing into communication with the interior of the controlled environment chamber; and
a measuring module comprising a particle measuring unit and a casing-measuring interface configured to couple to the rigid transport carrier casing coupled to the controlled environment chamber in the place of the door,
characterized in that said casing-measuring interface comprises a measuring head protruding from a base of the casing-measuring interface, bearing a first sampling orifice connected to the particle measuring unit, said measuring head having a generally parallelepipedal shape with five faces protruding from the base of the casing-measuring interface and each face having at least one injecting nozzle configured to direct a gas jet onto a respective location on the rigid casing coupled to the controlled environment chamber, the respective orientations of the injecting nozzles being fixed relative to the coupled rigid casing,
wherein the particle measuring unit comprises a gas source connected to the sampling line and configured to inject a purging gas into the sampling line.