US 9,810,600 B2
Method for detecting a leak on a non-rigid test specimen
Daniel Wetzig, Köln (DE); and Silvio Decker, Köln (DE)
Assigned to Infinicon GMBH, Köln (DE)
Appl. No. 14/369,960
Filed by Inficon GMBH, Köln (DE)
PCT Filed Dec. 28, 2012, PCT No. PCT/EP2012/077079
§ 371(c)(1), (2) Date Jun. 30, 2014,
PCT Pub. No. WO2013/102610, PCT Pub. Date Jul. 11, 2013.
Claims priority of application No. 10 2012 200 063 (DE), filed on Jan. 3, 2012.
Prior Publication US 2014/0326051 A1, Nov. 6, 2014
Int. Cl. G01M 3/32 (2006.01); G01M 3/36 (2006.01); G01M 3/38 (2006.01); G01M 3/40 (2006.01)
CPC G01M 3/36 (2013.01) [G01M 3/3218 (2013.01); G01M 3/3281 (2013.01); G01M 3/38 (2013.01); G01M 3/40 (2013.01)] 8 Claims
OG exemplary drawing
1. A method for detecting leaks on a non-rigid test specimen, comprising the steps of:
introducing the test specimen into a film chamber,
lowering the pressure in the film chamber outside of said test specimen, and
detecting a leak in the test specimen on the basis of a spatial change in a film of said film chamber; and
wherein the pressure in the film chamber is reduced to a pressure that is lower than the pressure in the test specimen by at least 500 mbar and preferably by at least 950 mbar.