US 9,810,597 B2
Sniffer leak detector with multi-stage membrane pump
Heike Hilgers, Bergisch Gladbach (DE); Hjalmar Bruhns, Bonn (DE); Daniel Wetzig, Cologne (DE); and Norbert Rolff, Kerpen (DE)
Assigned to Inficon GmbH, Cologne (DE)
Appl. No. 15/21,054
Filed by Inficon GmbH, Cologne (DE)
PCT Filed Sep. 2, 2014, PCT No. PCT/EP2014/068582
§ 371(c)(1), (2) Date Mar. 10, 2016,
PCT Pub. No. WO2015/036282, PCT Pub. Date Mar. 19, 2015.
Claims priority of application No. 10 2013 218 506 (DE), filed on Sep. 16, 2013.
Prior Publication US 2016/0223424 A1, Aug. 4, 2016
Int. Cl. F04D 19/04 (2006.01); G01M 3/20 (2006.01); G01L 19/06 (2006.01)
CPC G01M 3/205 (2013.01) [G01L 19/0654 (2013.01); F04D 19/046 (2013.01)] 8 Claims
OG exemplary drawing
1. A sniffer leak detector comprising:
a mass spectrometer for analyzing hydrogen or helium,
a turbomolecular pump which is connected with said mass spectrometer and whose outlet is connected with a prevacuum pump, and
a sniffer probe which comprises a plurality of intake lines and is connected with an inlet of said turbomolecular pump, and
a vacuum pump comprising at least three stages whose inlet stage defines said prevacuum pump and is connected with said outlet of said turbomolecular pump via a blocked throttle,
wherein, between adjacent stages of said vacuum pump, an intermediate inlet each is provided, wherein each intermediate inlet is connected with a different intake line of said sniffer probe and at least one of the intake lines as a suction line is connected with said inlet of said turbomolecular pump for obtaining different gas flows.