US 9,810,594 B2
Thermally stable high temperature pressure and acceleration optical interferometric sensors
Martin A. Sanzari, Fairlawn, NJ (US)
Assigned to Kulite Semiconductor Products, Inc., Leonia, NJ (US)
Filed by Kulite Semiconductor Products, Inc., Leonia, NJ (US)
Filed on Jan. 7, 2016, as Appl. No. 14/989,901.
Claims priority of provisional application 62/101,314, filed on Jan. 8, 2015.
Prior Publication US 2016/0202135 A1, Jul. 14, 2016
Int. Cl. G01B 9/02 (2006.01); G01L 9/00 (2006.01); G01L 19/04 (2006.01); G01P 15/093 (2006.01)
CPC G01L 19/04 (2013.01) [G01L 9/0079 (2013.01); G01P 15/093 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A sensor assembly, comprising:
a diaphragm configured to deflect responsive to an applied stimulus;
a sensing optical interferometer having a first optical cavity in communication with at least a portion of the diaphragm, the sensing optical interferometer is configured to interact with received first light to produce a measurement light signal corresponding to the applied stimulus;
a reference optical interferometer having a second optical cavity in communication with a cavity that extends partially through a diaphragm support structure, the reference optical interferometer is configured to interact with received second light to produce a reference light signal; and
a housing in communication with the diaphragm and the diaphragm support structure, and configured to reduce a thermal expansion mismatch in the sensor assembly.