US 9,810,523 B2
Damage determination of V-shaped groove guide on roller V-shaped
Yu-Hsuan Lin, Taipei (TW); Chih-Chung Yang, Taipei (TW); Kuo-Cheng Huang, Taipei (TW); and Tai-Shan Liao, Taipei (TW)
Assigned to NATIONAL APPLIED RESEARCH LABORATORIES, Taipei (TW)
Filed by NATIONAL APPLIED RESEARCH LABORATORIES, Taipei (TW)
Filed on Jan. 21, 2015, as Appl. No. 14/602,259.
Prior Publication US 2016/0209202 A1, Jul. 21, 2016
Int. Cl. G01B 11/08 (2006.01); G01B 11/24 (2006.01)
CPC G01B 11/08 (2013.01) [G01B 11/24 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A method for determining if a wire guide roller having a plurality of V-shaped grooves, each having a copper line thereon, arranged column-by-column on a periphery direction thereof is failed after slicing a plurality of wafers, comprising steps of:
(a) using a post-processing PC to define a normalized damage equation involving a plurality of parameters for a damage ratio of each of the plurality of V-shaped grooves, and set a minimum acceptable damage ratio;
(b) using an optical inspection device to acquire a picture of each of the plurality of V-shaped grooves in a depth direction thereof;
(c) using the post-processing PC to determine each of the plurality of parameters from the picture of each of the plurality of V-shaped grooves acquired from the optical inspection device;
(d) using the post-processing PC to calculate the damage ratio of each of the plurality of V-shaped grooves from the normalized damage ratio, respectively;
(e) using the post-processing PC to compare the damage ratio of each of the plurality of V-shaped grooves and the minimum acceptable damage ratio to determine if the V shaped groove is failed, respectively;
(f) using the post-processing PC to calculate an arithmetic damage relationship for the plurality of V-shaped grooves; and
(g) using the post-processing PC to compare the arithmetic damage relationship and the minimum acceptable damage ratio to determine if the wire guide roller is failed.