US 9,810,258 B2
MEMS hinges with enhanced rotatability
Raviv Erlich, Rehovot (IL); and Yuval Gerson, Tel-Mond (IL)
Filed by Raviv Erlich, Rehovot (IL); and Yuval Gerson, Tel-Mond (IL)
Filed on Dec. 15, 2016, as Appl. No. 15/379,512.
Application 15/379,512 is a continuation of application No. 14/825,213, filed on Aug. 13, 2015, granted, now 9,546,508.
Application 14/825,213 is a continuation of application No. 14/207,796, filed on Mar. 13, 2014, granted, now 9,140,042, issued on Sep. 22, 2015.
Claims priority of provisional application 61/781,086, filed on Mar. 14, 2013.
Prior Publication US 2017/0152887 A1, Jun. 1, 2017
Int. Cl. F16C 11/12 (2006.01); F16F 1/48 (2006.01); B81C 1/00 (2006.01); B81B 3/00 (2006.01); G01P 15/093 (2006.01); G01P 15/125 (2006.01); G01P 15/09 (2006.01); G01C 19/02 (2006.01); G02B 26/08 (2006.01); G02B 26/10 (2006.01)
CPC F16C 11/12 (2013.01) [B81B 3/0043 (2013.01); B81C 1/0015 (2013.01); F16F 1/48 (2013.01); G01C 19/02 (2013.01); G01P 15/09 (2013.01); G01P 15/093 (2013.01); G01P 15/125 (2013.01); G02B 26/0833 (2013.01); G02B 26/105 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/034 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0163 (2013.01); B81C 2201/013 (2013.01); F16F 2224/025 (2013.01); F16F 2226/00 (2013.01); F16F 2226/042 (2013.01); Y10T 16/525 (2015.01)] 17 Claims
OG exemplary drawing
 
1. A mechanical device, comprising:
a long, narrow beam made of a rigid, elastic material of a given length and transverse dimensions;
a rigid frame configured to anchor at least one end of the beam, which is attached to the frame, and to define a gap running longitudinally along the beam between the beam and the frame, so that the beam is configured as a hinge so as to rotate about a longitudinal axis of the beam relative to the frame and is free to rotate within the gap with an initial torsional spring constant Kφ determined by the length and transverse dimensions of the beam; and
a solid filler material, different from the rigid, elastic material, which fills at least a part of the gap between the beam and the frame so as to permit rotation of the beam about the longitudinal axis within the gap such that the torsional spring constant increases by no more than 20% relative to the initial torsional spring constant Kφ, while inhibiting a transverse deformation of the beam.