US 9,810,208 B2
Cryopump and method for regenerating the cryopump using two-stage discharge process
Toshiyuki Kimura, Tokyo (JP)
Assigned to SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo (JP)
Filed by Sumitomo Heavy Industries, Ltd., Tokyo (JP)
Filed on Mar. 12, 2014, as Appl. No. 14/206,510.
Claims priority of application No. 2013-049483 (JP), filed on Mar. 12, 2013.
Prior Publication US 2014/0260338 A1, Sep. 18, 2014
Int. Cl. B01D 8/00 (2006.01); F04B 37/08 (2006.01); F04B 37/00 (2006.01)
CPC F04B 37/085 (2013.01) [F04B 37/08 (2013.01); B01D 8/00 (2013.01); F04B 37/00 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A cryopump comprising:
a cryopanel;
a cryopump housing arranged to enclose the cryopanel;
a control unit configured to control evacuation of the cryopump housing and supply of a purge gas to the cryopump housing for full regeneration of the cryopanel,
wherein the control unit is configured to perform:
a first rough-and-purge process that includes alternately performing a first rough-and-purge evacuating of the cryopump housing and a first rough-and-purge supplying of the purge gas in a first pressure range, and
a second rough-and-purge process that includes, subsequent to the first rough-and-purge process, alternately and cyclically repeating a second rough-and-purge evacuating of the cryopump housing to a low pressure region below the first pressure range and a second rough-and-purge supplying of the purge gas to the cryopump housing, and
wherein the second rough-and-purge process includes making a determination at least once in the low pressure region as to whether the second rough-and-purge process should be terminated, and a plurality of cycles of the alternately and cyclically repeating of the second rough-and-purge evacuating of the cryopump housing and the second rough-and-purge supplying of the purge gas to the cryopump housing are performed prior to a first-time determination as to whether the second rough-and-purge process should be terminated.