US 9,809,880 B2
Atomic layer deposition apparatus
Choel Min Jang, Seoul (KR); In Kyo Kim, Seongnam-si (KR); Suk Won Jung, Seoul (KR); and Myung Soo Huh, Suwon-si (KR)
Assigned to SAMSUNG DISPLAY CO. LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co. Ltd., Yongin, Gyeonggi-Do (KR)
Filed on Jul. 28, 2014, as Appl. No. 14/444,231.
Claims priority of application No. 10-2014-0031009 (KR), filed on Mar. 17, 2014.
Prior Publication US 2015/0259798 A1, Sep. 17, 2015
Int. Cl. C23C 16/00 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/54 (2006.01)
CPC C23C 16/45546 (2013.01) [C23C 16/45502 (2013.01); C23C 16/45527 (2013.01); C23C 16/45548 (2013.01); C23C 16/45578 (2013.01); C23C 16/545 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An atomic layer deposition apparatus comprising:
a first base plate on which a seat portion is defined to allow a substrate to be seated thereon;
a second base plate disposed opposite to the first base plate;
a first gas nozzle portion arranged on the second base plate and extending in a first direction;
a second gas nozzle portion arranged on the second base plate to be spaced apart from the first gas nozzle portion and extending in a first direction; and
a plurality of injection holes disposed on the first gas nozzle portion and the second gas nozzle portion,
wherein the first base plate and the second base plate contact each other and form a space to which the first gas nozzle portion and the second gas nozzle connected,
wherein the plurality of injection holes are aligned in the first direction, and
wherein the space is opened in a second direction which is perpendicular to the first direction,
wherein
the first base plate comprises:
a first reference surface; and
a first recessed groove recessed from the first reference surface and having an open side,
the second base plate comprises:
a second reference surface; and
a second recessed groove recessed from the second reference surface and having an open side,
the first recessed groove and the second recessed groove define a reaction space having an opening when the first base plate and the second base plate are disposed to contact each other,
the seat portion is on the first base plate in the reaction space, and
the first gas nozzle portion and the second gas nozzle portion are arranged on the second base plate in the reaction space.